Used TRIKON / AVIZA Celsior #293665944 for sale

TRIKON / AVIZA Celsior is a professional full-field, high-resolution wafer etcher / asher used to etch, deposit, strip, and clean broad-range substrates in the semiconductor fabrication process. It is a highly reliable, fully-automated, and cost-effective production tool. AVIZA Celsior etcher/asher features several advanced technologies, including the Automatic Exchange System (AES) and the Remote Plasma Source (RPS). The AES provides the benefits of real-time quality control and fast availability of the process recipes. The RPS is a modular source of the reactive plasma, allowing a uniform etching of all parts of the substrate. In addition, the machine is equipped with an advanced Dynamic Thermal Control (DTC) system which ensures a stable etching and depositing process at any stage of the procedure. Also, TRIKON Celsior is able to run a wide range of process recipes to achieve different results. These include etching substrates such as silicon, quartz, alumina, and TiN. It also has the capability to deposit various materials, including metals, polyimide, SiO2, SiN, and more. Furthermore, Celsior incorporates a dedicated tool to clean and polish the substrate, as well as to control and monitor the chamber conditions. The software package features automated maintenance and diagnostics, password protection, real-time parameter logging, particle tracking, and more. TRIKON / AVIZA Celsior etcher/Asher is designed for use in a cleanroom environment with strict safety protocols. It is easy to operate and maintain, ensuring optimal quantities of substrates are processed efficiently and with superior quality. The etcher/asher is also engineered for parallel processing capabilities, making it an ideal choice for high-volume production lines. In summary, AVIZA Celsior is a versatile, fully-featured etcher/asher designed to perform a wide list of etching and deposition processes. Its advanced automation technology and monitor and control systems ensure efficient and uniform operation, with superior substrate quality, providing reliable and cost-effective chip fabrication.