Used TRIKON / AVIZA Celsior #9180428 for sale
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ID: 9180428
Wafer Size: 12"
Atomic Layer Deposition (ALD) systems, 12"
ALD Oxide system:
BROOKS Gemini express central hub
(6) Facets for attachment of process modules
(2) Facets for pass through to atmospheric front end
Atmospheric front end with BROOKS
3-Axes robot
BROOKS Acculine wafer aligner
(2) BROOKS BOL TS/M Compatible load port modules
12" FOUP / Manual load
SMIF / Manual load, 8"
Off-board power distribution
Control enclosure for local branch circuit protection
Communication hubs
DC Power supplies
Input / Output hardware
Multiple process modules with hot wall reactor chamber
Shower head injection system
Single zone stage heater
Optimized for oxide deposition: 300°C to 500°C
Standard PM on board chemical vapor
Delivery system with integrated gas block design
Argon bubbled canisters for liquid source
IBM PC Compatible computer
OS With operator interface
Data acquisition
Recipe creation and storage
ALD Process module:
Single process module (PM)
With hot wall reactor chamber
Shower head injection system
(2) Zones stage heater optimized for oxide deposition
Process module:
Nola process module
Wafer transfer module
SECS / GEM Compliance, 12"
(2) Training credits
(2) Installation manuals
(2) Programmers manuals
(2) Operation manuals
(2) Maintenance manuals
(2) Systems schematics on CD-ROM
Options:
Signal light tower
Ionizer bar
System spares and tools:
Celsior shower-head swap kit
Includes:
Load-port handoff buttons
Digital MFCs
With digital (4 MFCs / PM)
Celsior fixture kit:
Stage heater calibration fixture
Ceramic removal fixture
Vacuum viewing fixture included
Robot teach fixture.
TRIKON / AVIZA Celsior is an advanced etching/ashing equipment designed for precision and high-speed etching and ashing of substrates. This innovative system utilizes a unique unit of OTS (Opto-Thermal Sputtering) technology with a wide range of process capabilities. This machine is the industry standard for evaporation, ion bombardment, oxidation, and etching/ashing of substrates during the semiconductor manufacturing process. AVIZA Celsior features an Opto-Thermal Sputtering (OTS) tool, a unique process that uses light to sputter the substrate and evaporate it. This asset provides precise control of the sputtering process and ensures consistent high-quality results. TRIKON Celsior also features a large, uniform substrate heating area that allows for fast and uniform annealing of the processed surfaces. Celsior uses an integrated, advanced digital closed-loop control model to accurately monitor the process parameters. This ensures that only the desired amount of material is applied to the substrate during the etching/ashing process. Additionally, TRIKON / AVIZA Celsior is equipped with integrated safety features, including emergency stop capabilities, to protect operators from potentially hazardous situations. AVIZA Celsior comes standard with a variety of different substrate sizes, ranging from 75-150 mm. The equipment is also capable of handling a variety of different materials, such as silicon, quartz, glass and other common substrates. TRIKON Celsior has also been designed to process both metal and dielectric materials. Celsior is designed for long-term reliability and is capable of producing thousands of high-quality processes. TRIKON / AVIZA Celsior is also easy to use, with a simple control wheel that allows operators to fine-tune parameters quickly and accurately. Additionally, AVIZA Celsior features a range of advanced diagnostics and remote monitoring to help operators quickly identify and resolve any potential issues. TRIKON Celsior is an advanced etching/ashing system that provides fast, reliable, and precise results for a variety of different applications. The unit is user-friendly, and its advanced control machine ensures that only the desired amount of material is applied. Celsior is also designed for long-term reliability, with a variety of different substrate sizes and different materials supported. This makes TRIKON / AVIZA Celsior an ideal choice for a variety of different semiconductor manufacturing processes.
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