Used TRIKON / AVIZA Celsior #9226879 for sale

TRIKON / AVIZA Celsior is an advanced precision etcher and asher equipment designed to offer extremely high accuracy patterning and processing. The system is optimized to achieve the smallest feature sizes and the most precise patterning and ashing results, allowing microelectronic professionals to develop tiny features across their semiconductor substrates. The unit is designed for clean, immediate, and accurate processing to ensure optimal performance of electronic devices. AVIZA Celsior features low power requirements, low-cost operation, and versatile ashing capability, allowing users to choose from a variety of chemical sources and powder preparation techniques. By utilizing a novel alloy-compatible etch chamber, TRIKON Celsior is capable of producing joint-free etching of alloys or even multiple films. Moreover, the etch chamber is equipped with an integrated vacuum-assisted reflow to ensure proper melting and uniform mixing of deposited metals. The machine is capable of precise etching and ashing of substrates as small as 8mm, allowing a high degree of accuracy for smaller feature sizes. Additionally, Celsior is capable of processing substrates measured up to 32 millimeters in size with unequaled finesse. In terms of precision etching and ashing throughput, the machine has a maximum of ten etching and ashing stages with variable time for each step. The tool also includes features such as online monitoring of process parameters, automatic end-of-run protocols, automatic feedback parameters, variety of mask types, enhanced mechanical handling of wafers, and more. To ensure optimal safety for users, TRIKON / AVIZA Celsior is designed with an airlock interlock asset and includes process-specific safety guards. AVIZA Celsior is an ideal tool for the production of tiny and tight patterned layers in the device fabrication process. It is a perfect choice for any laboratory or production environment that requires accuracy and reliability with minimal downtime. The low power requirement and high degree of accuracy make it a cost-efficient choice for processing a variety of microelectronic substrates.