Used TRIKON / AVIZA FxP #9135551 for sale
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TRIKON / AVIZA FxP is an advanced etcher (or asher) used in the fabrication of semiconductor devices. It is a versatile, cost-effective, and automated tool that is suitable for both front-end and back-end processing. The device is equipped with an automated process control algorithm that provides an intuitive user interface and precise control over the etching process. The device's graphic user interface enables operators to input various parameters for etching, such as time, power, pressure, and flow rate. Furthermore, the software allows for multiple recipe set-ups and the flexibility to modify them as needed. The hardware features a 6-axis robotic arm that moves the wafer stage and the masking head during the etching process. This provides a precise control of the etching parameters and enables uniform etching of both patterned and unpatterned substrate surfaces. AVIZA FxP offers advanced process capability, such as simultaneous multicrystal etching. It also provides a high rate of etch throughput, increasing production efficiency and reducing cost. The device is outfitted with a multi-target etch chamber, which enables multiple wafers to be processed in a single process cycle. This chamber enables simultaneous etching of different times, pressures, and voltages, and eliminates the necessity of transferring the wafers to different chambers. In addition to providing precise etching control and optimized performance, TRIKON FxP is extremely safe to use. It is equipped with an array of operational features and safety features to protect the user and the wafers, guaranteeing easy, safe and reliable usage. These features include built-in diagnostics, adjustable safety alarms, and gas flow shut-off capabilities. The innovative design of FxP also supplies maximum operator safety during the etching process by encasing the potentially hazardous gas distribution components within a sealed radiator. TRIKON / AVIZA FxP is an excellent piece of equipment for etching precise patterns and features on wafers. It offers precise process control, high throughput, user-friendly and automated operation, along with advanced safety features. In conclusion, AVIZA FxP is the perfect etcher to meet the demands of today's ever-evolving semiconductor device fabrication requirements.
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