Used TRIKON / AVIZA Omega  FxP #293799540 for sale

TRIKON / AVIZA Omega  FxP is an advanced etcher/asher specifically designed for precision etching and ashing in the semiconductor industry. It features an advanced, automated fluid control equipment that allows for an optimized processing time and reduced cycle times. The machine can be used for advanced etch-ash of photoresist, metallization, MEMS, photovoltaics, and other materials used in semiconductor device fabrication. The machine is unique in its design, featuring an open frame construction, an optical view window, and an easy-access chamber for quick maintenance and operation. The machine combines a high-efficiency vacuum system, a precision gas delivery unit, and a powerful heating and cooling machine to offer excellent precision control during etching and ashing processes. That ensures that the surface of the sample is fully covered with the selected etchant and is not damaged in any way. AVIZA Omega  FxP also features advanced safety systems such as thermocvlves and a gas monitoring sensor to detect hazardous situations and shut down the tool in case of an emergency. This ensures optimum working conditions for the user while working in the etcher/asher. The machine has a targeting accuracy of up to 1µm and can be operated at temperatures ranging from -65°C up to 500°C. It is capable of processing substrates up to 200 mm in size and supports various process gases such as CF4, O2, SF6, and Ar. For etching or ashing, TRIKON Omega  FxP also features a unique dual-mode ion source that offers both single-step and multi-step etching in one asset. This allows for a high degree of precision and an even etch/ash pattern on the sample's surface. All the components of the machine are of superior quality, guaranteeing the most reliable and precise etching and ashing processes. Omega  FxP is a fully automated tool that allows for quick set up and quick cycle times. This makes the model an excellent choice for any advanced etch-ash process in semiconductor device fabrication.