Used TRION Sirus T2 #9235359 for sale

TRION Sirus T2
Manufacturer
TRION
Model
Sirus T2
ID: 9235359
Wafer Size: 12"
Vintage: 2009
Tabletop RIE system, 12" 2009 vintage.
TRION Sirus T2 is a state-of-the-art etcher / asher designed to create precise, accurate and reliable results in a variety of fields. It is capable of operation with a wide range of etching/ashers and gases. It allows precise control of etch rate and creates high-quality geometries with no drift or changes in areas. Sirus T2 is powered by a digital microprocessor-controlled system for temperature, timer, and process parameters settings, which enables precise control of the etching and ashing processes, enabling repeatable and stable processes. Additionally, it is capable of supporting a wide range of chemicals for etching and ashing processes, including O2, Ar, N2, or other chemical gases. TRION Sirus T2 is also equipped with a high-resolution vision system and includes two wafer-level alignment systems. This allows precise alignment of each wafer to the process chamber, and allows precise positioning of the etch tips. The etch tips are special tips designed to provide optimal etch profiles. These tips work together to provide uniform etching and ashing on the wafer chips, resulting in precise and accurate results. Sirus T2 offers several safety features, such as process chamber ventilation and pressure monitoring, and ES2 compliant vessels and systems. It is also able to monitor and control temperature, and provide process feedback to ensure optimal etching and ashing results and the highest quality possible. The device is also equipped with advanced software capabilities, which allow users to customize the etch rate, number of cycles, time, and type of gases used. Additionally, the software offers a variety of high-level features, including recipe management and concept-level libraries, which enable the user to quickly develop and learn new recipes. TRION Sirus T2 is designed for precision, accuracy and reliability and is perfect for use in laboratories, universities, research and development, and production facilities. It offers flexibility, scalability and reliability, allowing it to take on the most challenging etching and ashing tasks. With its advanced features, this etcher/asher offers superior performance, accuracy and reliability.
There are no reviews yet