Used UNAXIS / NEXTRAL 860L #9172081 for sale

UNAXIS / NEXTRAL 860L
ID: 9172081
ECR Etching system.
UNAXIS / NEXTRAL 860L is a next-generation etcher/asher specially designed for a wide range of wet etching and ashing applications. It offers an efficient and controlled dry-etching process that enables users to achieve reliable, repeatable results. UNAXIS 860L is equipped with a dual-source plasma configuration, providing precise etching and ashing performance with adjustable process settings and tailor-made process recipes. It is capable of generating precisely stable etching results. NEXTRAL 860L also offers a high-performance ionized gas extraction and cleaning system that allows the industrial users with very small i.d. tubing products to extract and clean their parts in a uniform manner. Equipped with a variety of options, 860L offers outstanding uniformity of etching process. Programmable recipe setting, pressure measurement, and auto-calibration provide users with an easy, personalized process control. UNAXIS / NEXTRAL 860L also offers oxide removal and deposition functions to reduce oxide overburden and increase the etch process efficiency. UNAXIS 860L is designed with efficient material management in mind. It has a high volume load capacity and the ability to process part sizes up to 400mm x 250mm (16″ x 10″). Its custom designed process chamber has been optimized to provide uniform etching at a low process temperature and pressure, making it highly efficient. In addition, NEXTRAL 860L is also designed to improve safety. It is provided with automated gas delivery, which exposes users only to controlled environment. 860L has been outfitted with built-in fire control systems to prevent any incident from spreading throughout the facility. Overall, UNAXIS / NEXTRAL 860L is an ultra-efficient etcher/asher that offers superior performance, reliability, and precision. It is suitable for industrial applications and is easy to set up and use. UNAXIS 860L offers a wide range of flexible process recipes, making it an ideal choice for industrial etching and ashing processes.
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