Used UVOCS T10X101/OES #293621296 for sale

Manufacturer
UVOCS
Model
T10X101/OES
ID: 293621296
UV Ozone cleaning system.
UVOCS T10X101/OES is an etcher/asher that provides precise and comprehensive control of etching and ashing processes. It is a full-size, single-side etcher/asher with controlled process gas environments. It works on a wide variety of surfaces and offers numerous advantages over manual coating processes. Its features make this device perfect for applications such as removing old layers, diffusion of layers and/or ashing of layers. The etcher/asher is equipped with two doors, one for loading and unloading material, the other for entry and exit. This facilitates easy introduction and removal of materials. The etcher/asher also features a recirculation and filtration system, which enables the removal of particles from the process gas. This improves the process efficiency and results in high material surface homogeneity. The etcher/asher offers several thermal and chamber controls, including temperature adjustments from 25°C to 600°C, programmable etching/ashing times in a range of 0.1 ms to 1000 hours, and adjustable pressure and flow rate. All of these controls allow for full optimization of etching and ashing processes, depending on the surface and the material used. This helps in obtaining even surfaces with minimal defects, compared to manual coating processes. UVOCS T10X101/OES is compatible with three types of chamber gases - helium, nitrogen, and argon. It provides excellent control over the electrical characteristics of these gases, allowing for accurate and precise control of substrate properties. Additionally, the etcher/asher supports a number of standard accessories such as an electrode, showerhead, gas detector, insulation cylinder and thermocouple. All these accessories add to the flexibility and efficiency of the unit. UVOCS T10X101/OES has several safety features, including safety valves and temperature pressure-relief valves, to ensure safe and reliable operation. It is also equipped with advanced self-diagnostic functions, designed to detect any abnormalities and diagnose them instantly. This ensures that the etcher/asher maintains its performance over time. The etcher/asher also comes with several built-in automation options, allowing for automated operation and removal of material. This ensures that the etching/ashing process is performed quickly, consistently and safely. Additionally, the etcher/asher offers easy remote PC control and data logging, providing the user with the ability to monitor and adjust the process settings from any remote location. Overall, UVOCS T10X101/OES is an innovative and powerful etcher/asher that can provide superior results in a wide range of etching and ashing applications. With an array of configurations and automation options, this device is sure to meet your needs for precision etching and ashing in the laboratory.
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