Used VEECO / MICROETCH 1201 #293628796 for sale

ID: 293628796
Ion Beam Etcher (IBE).
VEECO / MICROETCH 1201 is a deep plasma etcher and asher designed for advanced plasma etching, ashing, and deep reactive ion etching (DRIE) applications. The equipment is designed for use in a wide variety of industries, such as research, development, and industrial production. VEECO 1201 features a robust and reliable design, MICROETCH 1201 has a small footprint and fits in almost any laboratory environment, making plating and etching of small components easy. The system performs an array of etch processes for complex lithography, including deep etching/Ion milling, IC/MEMS etching, semiconductor etching, laser ablation and micro-fabrication processes. 1201 provides precision control of the etch process through its advanced onboard artificial intelligence (AI) and microprocessors. The AI unit automatically optimizes etching parameters and precisely controls the throughput of the process. The machine is capable of etching with a wide range of gases, including fluorocarbons, methane, nitrogen, and oxygen. VEECO / MICROETCH 1201 also features two independent power supplies to enable multiple etching tasks to be done simultaneously. The tool operates with a low-pressure plenum chamber and direct-driven substrate platform that minimize contamination and surface damage. VEECO 1201 is built with an inner chamber that is designed for thermal stability, isolation from external pressure, and a secure atmosphere environment. MICROETCH 1201 also helps to reduce downtime by utilizing quick-override gas controls, ensuring fast and reliable throughput of the etch process. With 1201, users have access to a wide range of process monitoring and data acquisition tools, such as real-time spectroscopy of the etchant, time-of-flight mass spectroscopy, and basic and advanced process control to enable users to fine-tune the process. For advanced research applications, VEECO / MICROETCH 1201 offers an integrated spectroscopy platform to measure mass flux, substrate temperature, and lifetime of the plasma. Additionally, the asset is equipped with a multi-view fiber optic microscope to monitor the etching results. In conclusion, VEECO 1201 is a reliable and intuitive etching model that can accommodate a wide range of etch processes. It features a user-friendly interface and is built with reliable components and functions to ensure a consistent and precise etch every time. MICROETCH 1201 equipment provides users access to a variety of monitoring and advanced process control tools to fine-tune the plasma etching process and gain a higher level of control over their etch tasks.
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