Used VEECO / MICROETCH 1201 #9354607 for sale

ID: 9354607
Ion Beam Etcher (IBE).
VEECO / MICROETCH 1201 is a state-of-the-art etcher and asher equipment designed for a variety of advanced materials processes. It offers flexibility and adaptability through its unique modular design, allowing an expansive range of applications to be carried out. This etcher features a stress free, repeatable, and highly reliable results, with precision and consistency across a wide range of process temperatures and times. The flexible asher design allows for variation in nozzle position and temperature ranges for optimal etching. Additionally, VEECO 1201's enhanced optical system allows for optically enhanced uniform processing across the entire wafer. MICROETCH 1201 also offers large wafer processing capabilities with a 7 inch rotational support jig for uniform etching and ashing. This model also has an expanded platform for three-dimensional electrode substrates. It includes a cutting edge vacuum pump as well as the manual and machine transfer capability for wafer handling. Capable of supporting both chemical and physical processes, 1201 can etch and asher a variety of materials including silicon, quartz, yesalin, aluminum and copper. It is ideal for both single layer and multi-layer processes, as well as high or low temperature processes and other advanced applications. This etching/ashed unit features large negative pressure operating range for optimal results when processing sensitive substrates. It also includes an optical microscope for both process monitoring and measurement of etch depth and profile. VEECO / MICROETCH 1201 offers an aqueous and organic reactive gas delivery systems for flexibility when etching and ashing a variety of substrates and materials. It also boasts very precise control and monitoring with both PC and RS422 interface control. Additionally, VEECO 1201 has built in safety features including multiple overflow channels and protection circuitry to reduce potential damage from hazardous material spills. MICROETCH 1201 is an advanced etcher/asher that offers performance, accuracy, and flexibility to meet the most demanding applications. With its repeatable results, expanded substrate processing capabilities, and engineered safety features, this machine is an ideal tool for both single and multiple layer etching and ashing processes.
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