Used VEECO / MICROETCH RF-1201 #293628816 for sale
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VEECO / MICROETCH RF-1201 is a high performance RF Excimer-based etcher and asher equipment designed to provide a silicon feasible etch rate. The system is equipped with a patented high-speed, direct excimer laser that has the capability to etch the surface of the sample very quickly and efficiently. The unit is ideal for providing high uniformity and excellent reproducibility across a wide variety of device types. VEECO RF-1201 provides an excellent etch rate capability with a wide range of substrates such as SiN, Si-O-N, polyimide, photoresists, and polyethylene terephthalate (PET). MICROETCH RF-1201 incorporates an advanced vacuum machine that offers an enhanced process environment for faster etching rates and higher yields. Additionally, the tool offers a wide process window for fast and uniform etching, allowing for a variety of etch chemistries to be used. The asset is also equipped with an automatic excimer laser scanner and an automated fluid flow model to ensure optimal etch results. RF-1201 also features a highly intuitive user interface that is designed to be easy to use while providing a safe and user-friendly equipment operation. The intuitive user interface allows users to easily select the correct etch parameters, select the etch chemistry, and set the process variables such as pressure, temperature, flow rate, etc. Additionally, the system offers an automated safety unit for protection against hazardous events, making it suitable for industrial applications. VEECO / MICROETCH RF-1201 is an ideal tool for researchers and manufacturers looking to achieve a high level of repeatability and precision during etching and ashing operations. The machine is capable of performing a wide range of processes and can quickly and easily be set up to etch and asher a variety of samples. It is an excellent choice for those looking for a reliable and efficient etching tool with a high level of accuracy and repeatability in processing.
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