Used WONIK IPS HELITEX-AAS0 #293812084 for sale

ID: 293812084
Vintage: 2014
Reactive lon Etcher (RIE) RIE Cabinet RIE Chamber RIE Loader RIE Power cabinet RIE Tray short wood crate 2014 vintage.
WONIK IPS HELITEX-AAS0 is an advanced etcher/asher tool designed for high-performance semiconductor processing applications. This state-of-the-art equipment combines etching and ashing capabilities in a single equipment, offering unmatched process flexibility and efficiency for semiconductor fabrication. HELITEX-AAS0 is developed by WONIK IPS, a leading manufacturer of process equipment for the semiconductor industry, known for its innovative technologies and reliable solutions. At the core of WONIK IPS HELITEX-AAS0 system is its advanced plasma processing technology, which enables precise control and uniformity in etching and ashing processes. The tool utilizes a combination of gas chemistry, RF power, and chamber design to create a highly reactive plasma environment, allowing for highly selective and isotropic etching of various materials. This enables the tool to achieve high etch rates while maintaining excellent process control and repeatability. One of the key features of HELITEX-AAS0 is its dual-mode operation, which allows users to switch between etching and ashing processes seamlessly. The tool supports a wide range of process gases, enabling the etching of different materials such as silicon dioxide, silicon nitride, and various metals. Additionally, the ashing capability enables the removal of photoresist and other organic materials, ensuring clean and residue-free substrates. WONIK IPS HELITEX-AAS0 is equipped with a high-performance vacuum unit that provides rapid gas evacuation and high pumping speeds, ensuring efficient chamber cleaning and reduced cycle times. The tool features advanced process monitoring and control systems, including real-time endpoint detection and plasma diagnostics, allowing for precise process tuning and optimization. In terms of hardware, HELITEX-AAS0 is built on a robust and reliable platform, with a high-quality vacuum chamber, RF generator, gas delivery machine, and plasma source. The tool is designed for easy maintenance and serviceability, with convenient access to critical components for routine inspection and cleaning. WONIK IPS HELITEX-AAS0 is controlled by a user-friendly software interface that offers intuitive recipe programming, process monitoring, and data logging capabilities. The tool's advanced automation features enable high-throughput processing and seamless integration into semiconductor manufacturing environments. Overall, HELITEX-AAS0 etcher/asher tool offers a combination of advanced plasma processing technology, dual-mode operation, and user-friendly controls, making it an ideal solution for high-performance semiconductor fabrication. With its high process flexibility, efficiency, and reliability, WONIK IPS HELITEX-AAS0 is well-suited for a wide range of applications in the semiconductor industry, including advanced packaging, MEMS fabrication, and RF device production.
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