Used XACTIX E1 Mod #9174878 for sale
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ID: 9174878
Wafer Size: 6"
Vintage: 2004
XeF2 (xenon difluoride) Isotropic silicon etcher
Photo-resist
Silicon dioxide
Silicon nitride
Aluminum
2004 vintage.
XACTIX E1 Mod is an etcher/asher designed for laboratory applications, such as the fabrication of electronics, optics, and MEMS devices. It is a stainless steel platform with a 2.5"x 2.5" quartz etching chamber, providing etching and ashing capabilities in a user-friendly, cost-effective package. E1 Mod is built for superior robustness, precision, and durability in experienced and novice applications alike. Constructed with top-of-the line materials, XACTIX E1 Mod features an etched quartz surface resistant to damage or adhesion of substrate, non-conductive surfaces, long-running processes, and heated performance up to a maximum of 500°C. It also features a high-power RF generator, providing higher etching yield and better etching quality compared to conventional thermal etching. E1 Mod is designed for ease of use and reliability, featuring a touch interface, intuitive command structure, and dual-digit pressure/temperature display. It also features a top-side RF connection for better process reproducibility and rapid frequency fine-tuning of plasma parameters. Finally, XACTIX E1 Mod is outfitted with a full-peripheral center to connect to external systems and devices, allowing for seamless integration into existing laboratory setup. All in all, E1 Mod is a reliable, cost-effective, and robust platform perfect for experienced and novice alike. With its top-of-the-line materials, superior precision, and user-friendly interface, XACTIX E1 Mod is the perfect solution to a variety of laboratory etching/dicing/polishing/cleaning processes.
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