Used YES / GLEN R3 #9124011 for sale
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ID: 9124011
Plasma cleaner
Sequential microprocessor: Up to 90 separate one or two gas programs
Power supply: YES 500 Watt
(2) Gas inputs with one back fill input
(4) Electro sets/sample trays: 12 3/4 x 12 3/4
(2) Additional trays
Total capacity = 325 sq. in
Pilot run quantities,
115V, 60 Hz Single phase
1.5 Amps
175 W.
YES / GLEN R3 is an etcher/asher equipment designed to etch/ash a wide variety of materials, including silicon, aluminum, zinc, gold, and platinum. It is equipped with a linear motion X-Y stage, which allows it to accurately position enables precise control of etch/ash depth and etch/ash area width. A vacuum pump with an adjustable vacuum pressure and exhaust system is included to aid in the etching/ashing process. YES R 3 includes a three-stage cascade shelving strip configuration, allowing it to be used for etching/ashing multiple materials in one pass. This unit is highly efficient and cost effective. It also allows for the uniform processing of substrates of different thicknesses at a low depth of etching/ashing, providing excellent performance. GLEN R-3 can deliver etch/ash times ranging from 30 seconds to 4 minutes, depending on the particular material giving R 3 a high throughput. The machine is designed to run both wet and dry etch/ash modes. The wet etch/ash technology enables the etching/ashing of materials that are difficult to etch/ash with dry etching methods. YES / GLEN R-3 is highly automated. It is programmed with a flexible control tool and user-friendly software. The control asset is designed to facilitate seamless and efficient transfer of process information. The user-friendly software is designed to save etch/ash recipes and auto-monitor the model. YES R-3 is equipped with a high temperature quartz process chamber, allowing it to etch/ash materials with temperatures from 1100 to 1500 °C. The high temperature chamber permits the formation of oxide layers on the surface of the materials that leads to enhanced corrosion resistance. YES R3 is also highly reliable and durable. The equipment is equipped with protection features, such as manual shut-off and emergency stop, ensuring safe and secure operation. In case of unexpected power loss, a UPS can be connected to the system to prevent material damage. Additionally, the unit is equipped with sensors to cut off supply power in case of over-temperature and over-pressure, providing safe operation. YES / GLEN R 3 is an efficient and reliable solution for etching/ashing a wide range of materials with high accuracy and throughput. Its flexibility in terms of compatibility with multiple materials, as well as its reliable performance, makes it an ideal machine for a variety of etching/ashing applications.
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