Used YES / GLEN R3A #293601248 for sale

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Manufacturer
YES / GLEN
Model
R3A
ID: 293601248
Vintage: 2001
Plasma cleaner PLC Controller ADVANCED ENERGY PE-1000 AC Plasma power source, 1 kW at 40 kHz (2) Electrodes: 14" x 14" (Capable of up to 8 sample trays) RS 232 Interface (3) Plasma modes: Active plasma RIE Plasma Downstream electron-free plasma Gas inputs: (2) Process gases Purge gas Full load current rating: 13 Amps Power supply: 110 V, 500 W, 60 Hz, Single phase 2001 vintage.
YES / GLEN R3A is a robust, reliable etcher/asher equipment, designed to support a wide range of etching/ashing processes. It combines advanced hardware and software to deliver consistent, high-quality results. The system is built on a custom-designed and tested chassis, which is composed of acid-resistant stainless steel and assembled with corrosion-resistant connectors. It houses a corrosion-protected anode and a heat sink for the removal of heat and unwanted oxidization. The flexibility of the design allows for it to be used for both etching and ashing applications. The core of the unit is comprised of two advanced etching/ashing electronics: an adjustable waveform generator and an adjustable high voltage power supply. The generator controls the waveform for the etching/ashing process, allowing for precise optimization of the power output and etching/ashing parameters. The high voltage power supply tightly controls the power input to the machine, providing uniform power parameters throughout the processing sequence. This ensures reproducible etch/ash results and high reproducibility of results. The hardware is further supported by an advanced software layer that provides an intuitive, user-friendly operating interface. The software layer allows the user to adjust and set parameters on the tool to meet different needs, such as etching rate, selectivity, uniformity, and reproducibility. It also provides traceability of changes and a range of other helpful features. YES R3A combines advanced hardware and software to provide a powerful, reliable etcher/asher asset. It is easy to install and use, and capable of consistent, high-quality etching/ashing results. Its adjustable waveform generator and high voltage power supply ensure uniform power parameters throughout the process, resulting in reproducible etch/ash results, and its intuitive user interface provides simple, effective control for a range of different needs.
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