Used YOKOGAWA Rainbow 4420 #9111383 for sale
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YOKOGAWA Rainbow 4420 is a highly effective etching and ashing equipment that is widely used in microelectronics and precision engineering processes. This system has the ability to perform a variety of etching and ashing processes including plasma etching, dry etching, wet etching, dry ashing, as well as chlorine-based etching and ashing. The unit features a wide range of programmable features and functions that allow users to accurately control the etching and ashing process. Rainbow 4420 is equipped with a Pulsed Facet Etching Chamber which makes it capable of performing a variety of etching and ashing processes. This chamber uses high frequency and low frequency oscillations to maintain a stable etching environment and reduce the generation of corrosive gaseous byproducts. The Pulsed Facet Etching Chamber also includes a Built-in Strip Tool designed for easy removal of metal and non-metallic materials such as Ta, Titanium, and Silicon from the etching area. YOKOGAWA Rainbow 4420 features a unique SUS316SS material chamber for plasma etching. This material is known for its excellent thermal and chemical resistance properties. The SUS316SS material can effectively protect the workpiece from any chemical residues or impurities generated during the etching process. The chamber's inner surface is corrosion-resistant and designed for all types of etching and ashing processes. Rainbow 4420 also features a Substrate Heating Plate which can be used to heat the substrate before and after etching or ashing processes. The temperature of the substrate can be accurately controlled through a thermostatically controlled heating machine. This tool can reach temperatures up to 600°C and is ideal for tasks such as CVD/ALD, separation processes, and oxide or nitride etching. Additionally, YOKOGAWA Rainbow 4420 includes a Semi-Auto Process Shut-Down feature that can be used to stop the etching or ashing process after a pre-determined amount of time. This feature helps to ensure a safe and efficient etching operation while avoiding any unwanted side-effects. Rainbow 4420 also features an Advanced Process Control Asset (APCS) which includes a suite of software components designed to provide maximum performance. This model includes components such as End Point Control, Rate Control, Hold Angle Control, and Tape Cut Angle Control, which offers users the ability to accurately program etching and ashing tasks. YOKOGAWA Rainbow 4420 is a highly reliable and efficient etching and ashing solution that is suitable for various precision engineering and microelectronics operations. This equipment offers a host of programmable features and functions that allow users to accurately control and monitor etching and ashing tasks.
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