Used AIRCO TEMESCAL FC 3200 #175666 for sale
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ID: 175666
Thermal evaporation system
Dual electron beam
Process chamber: 32" x 32", water-cooled
Flat planetary: 10.6", high speed
Control system: GE Fanuc PLC
Integrated cryo pump regeneration
Process recipe control
Data logging
Onboard flat screen integrated Windows PC
GE Fanuc PLC control system: Windows based PC with keyboard and trackball mouse
General Electric Cimplicity HMI Software
Operator / Engineer computer interface includes:
Data logging of: Ion & Convectron, valves & chamber heat
User level system control
Integrated cryo pump regen control
Process recipe editing
All required software programming
(2) Telemark TT-6, digital display and programmable sweep control
(2) single pocket Temescal electron Beam Guns
5KVA, SCR controlled transformer and fixturing to accept customer specified thermal evaporation boats. Feedthroughs for one resistive thermal source
(3) Separate source shutters for each source
(2) 2kw heater assemblies with feed throughs and temperature control, 4KW total
2 Ion / 4 Convectron gauge
32" x 32" S/S Process chamber (water cooled) with full opening door with viewport
VV-400 viewport with shutter, installed in lower chamber to view sources during deposition process
PLC closed loop pressure control through 02 MFC / Granville Phillips 354
Operational CTI 400 Cryo Pump with CTI 1020R compressor. PLC controlled automatic
regeneration and N2 purge gas heater
Deposition rate monitor using a Maxtek 6 mhz quartz crystal sensor, programmable
(3) planets for (4) 4" inch variable speed single plane planetary system; 12 wafers/run
Separate free standing rack for thermal power supply transformer and TT6 power units
Leybold D-30, 2 stage direct drive 26cfm mechanical pump.
AIRCO TEMESCAL FC 3200 evaporator is an advanced and efficient cooling equipment designed to accommodate a variety of commercial, industrial, and residential applications. This evaporator features a high-efficiency direct drive motor along with intelligent digital temperature control, providing maximum performance with consistent cooling. This system is built to last with its durable aluminum construction, ensuring years of reliable operation and low maintenance costs. FC 3200 uses a heavy-duty, dynamically balanced blower that produces an even flow with minimal noise, making it suitable for spaces where sound is a consideration. This unit's evaporator coils feature efficient fin design and are constructed of condensate-resistant aluminum fins, with post paint dip and epoxy processed coils to ensure reliability. This evaporator also comes equipped with a microprocessor controller that allows for precision control of temperature, fan speed, and other settings. AIRCO TEMESCAL FC 3200 is designed to be simple and easy to use, with a wide range of operational features such as an integral timer, digital backflow preventers, and built-in air purifiers to ensure consistent, high-quality air. This machine is also designed for easy maintenance, with easy-access components for easy access and cleaning. FC 3200 is also equipped with safety features to ensure worry-free operation. This tool utilizes a high-pressure cut-off switch, pressure transducer, and separate low-pressure switch to ensure safe and reliable operation. Additionally, this evaporator is outfitted with a non-volatile solid-state bypass switch that allows control of fan speed while maintaining evaporator performance. AIRCO TEMESCAL FC 3200 is designed to be energy-efficient and cost-saving. This evaporator is designed with a split-insulated line set that prevents condensate build-up, in order to conserve energy and keep down costs. The asset is also equipped with optimized fin spacing for better heat transfer and less energy loss, maximizing efficiency and performance. Overall, FC 3200 is a reliable and efficient evaporator model that is suitable for any commercial, industrial, or residential application. Featuring a durable aluminum construction, efficient fin design, and intelligent digital temperature control, this equipment provides reliable performance and cost-effective energy savings.
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