Used AST / ADVANCED SYSTEM TECHNOLOGY Peva-600E #9059480 for sale
URL successfully copied!
ID: 9059480
Wafer Size: 2 to 6
Vintage: 2011
Metal evaporator, 2"-6"
Includes:
(1) Multi-Layers Lift-Off process requirements (Ti, Al, Ni, Au, Cr, AuGe, etc.)
(2) Run to Run film uniformity control under % to ensure overall product yield
(3) Optimum evaporator chamber and pumping system design, effectively reduce cycle time and increase material usage (> 20%)
(4) Special design fixture dedicated to thin slice (<100mm) manufacturing process with optimum reliability
(5) Full automatic, intelligent PC control system
Specifications:
Wafer Numbers / Sizes: (108 -15) pcs
E-Beam Power: From 6 ~10 kW (Option)
Ultimate Pressure: < 1E-7 Torr
Based Pressure: 2E-6 Torr within 30 mins
Pumping System: Cryopump + Rotary Vane Pump or Dry pump (Option)
Automatic Control System: Industrial HMI with Graphic User Interface or Fully PC Interface Operation (Option)
Thickness/Rate and Process Control: RS-232 interfaced Real Time Controller including Sweeper, Indexer, Material, Tooling Factor, Soak, Ramp and Shutter
Substrate Temperature Control: RT ~ 350 ℃
Non-Uniformity: 5% for WIW, WTW and RTR
Power Requirement: AC220V, 3 phase, 60 Hz, 80A,
Dry N2 Requirement: 1.2 kgw/cm2
CDA Requirement: 5 kgw/cm2
Water Requirement: 1.5 kgw/cm2, 20℃, 30 l/min
2011 vintage.
AST / ADVANCED Equipment TECHNOLOGY Peva-600E evaporator is a highly effective and reliable evaporator designed to provide superior thermal performance in a variety of commercial and industrial applications. This evaporator is designed and manufactured to meet the highest standards for safety, durability, and efficiency. AST Peva-600E evaporator is equipped with a hermetically sealed, closed loop system that allows for the circulation of water without the introduction of significant evaporative losses. The evaporator utilizes an advanced MicroComputer-Controlled (MC-C) technology, which helps to monitor and regulate the operation and temperature of the evaporator. This allows for improved performance of the unit and ensures that it is safe and reliable. Additionally, the unit is designed with an auto water replenishment machine which helps to prevent any unnecessary over-capacity to the evaporator. ADVANCED Tool TECHNOLOGY Peva-600E evaporator is capable of running on a variety of energy sources, including gas, electric, and steam. This allows users to choose the most cost effective and efficient way to operate the evaporator. When it comes to energy efficiency, Peva-600E Evaporator is rated at an energy efficiency ratio (EER) of 14.3. This makes it perfect for applications with moderate to heavy-duty requirements and helps to maximize energy savings. The enhanced heat transfer rates of the evaporator make it very efficient compared to other evaporators of similar capacity. Additionally, it is capable of producing low-pressure drops, precise temperature control, and better cooling effectiveness. AST / ADVANCED Asset TECHNOLOGY Peva-600E evaporator is designed with a high-grade thermodynamic aluminum-based housing that helps to ensure durability and longevity. This allows it to with stand harsh operational environments and helps to ensure the safety of the unit. Additionally, this corrosion resistant housing allows it to provide reliable performance and maintain optimum temperature levels for extended time periods. AST Peva-600E Evaporator is also designed with a built-in self-diagnostic model that helps to monitor its performance and detects possible issues with the evaporator. This equipment will automatically alert users of any malfunction or other issues with the evaporator, enabling users to take corrective action and keep the system running smoothly. Additionally, the unit is also equipped with an emergency shut-down machine which will activate if necessary. Overall, ADVANCED Tool TECHNOLOGY Peva-600E Evaporator is an ideal choice for any commercial or industrial setting looking for an effective and efficient evaporator. Its advanced technology, efficient operation, and built-in safety features make it a trusted and reliable choice. Furthermore, its compact design and corrosion-resistant housing makes it perfect for any environment where space may be limited.
There are no reviews yet