Used AST / ADVANCED SYSTEM TECHNOLOGY Peva-600I #9059482 for sale
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ID: 9059482
Vintage: 2012
ITO Evaporator
(1) Multi-Layers Lift-Off process requirements (Ti, Al, Ni, Au, Cr, AuGe, etc.)
(2) Run to Run film uniformity control under % to ensure overall product yield
(3) Optimum evaporator chamber and pumping system design, effectively reduce cycle time and increase material usage (> 20%)
(4) Special design fixture dedicated to thin slice (<100mm)
(5) Full automatic, intelligent PC control system
Specifications:
Wafer Numbers / Sizes: (108 -15) pcs / (2"- 6")for Planetary Domes
E-Beam Power: From 6 ~10 kW (Option)
Ultimate Pressure: < 1E-7 Torr
Based Pressure: 2E-6 Torr within 30 mins
Pumping System: Cryopump + Rotary Vane Pump or Dry pump (Option)
Automatic Control System: Industrial HMI with Graphic User Interface or Fully PC Interface Operation (Option)
Thickness/Rate and Process Control: RS-232 interfaced Real Time Controller including Sweeper, Indexer, Material, Tooling Factor, Soak, Ramp and Shutter
Substrate Temperature Control: RT ~ 350 ℃
Non-Uniformity: 5% for WIW, WTW and RTR
Power Requirement: AC220V, 3 phase, 60 Hz, 80A,
Dry N2 Requirement: 1.2 kgw/cm2
CDA Requirement: 5 kgw/cm2
Water Requirement: 1.5 kgw/cm2, 20 ℃, 30 l/min
2012 vintage.
AST / ADVANCED Equipment TECHNOLOGY Peva-600I Evaporator is an AST designed for efficient air-conditioning and refrigeration systems. It is a self-contained, air-cooling unit which uses a compact ampac (ammonia vapor compressor) to cool air, while reducing the air humidity of a space. The unit provides efficient cooling with an optimal energy output. This evaporator is an ideal fit for industrial applications with temperatures ranging from -20 to 35 degrees Celsius. AST Peva-600I Evaporator is a reliable and intelligent piece of technology, constructed with a robust tech-polymer wall and rugged frame to ensure it can operate in difficult environments. It has been designed to effectively transfer heat from the air, allowing for effective and efficient cooling capacity. The unit uses an integrated condensate pans system to capture and remove excess condensate build-up, while preventing microbial and corrosion damage. The fan speed is adjustable to ensure a comfortable, consistent air temperature is maintained and a high flow rate is achieved. ADVANCED Unit TECHNOLOGY PEVA 600I Evaporator comes with a built-in LED display to allow for easy and precise diagnostics and temperature control. The user can easily adjust the temperature setting to match the desired cooling effect, while a selection of diagnostic codes allows for simple and convenient troubleshooting. The distro block feature allows for improved flow rate and the use of multiple evaporators operating independently in one machine. This feature increases the available surge volume by allowing a variety of evaporators to be stacked in series for greater cooling capacity. AST PEVA 600I Evaporator is designed with safety in mind. It utilizes sensors to detect tool failure and alert the user of any potential issues, such as high or low pressure, airflow decrease, or temperature imbalance. It also includes integrated self-diagnostics and alarms that detect operating irregularities and alert the user of any malfunctions. ADVANCED Asset TECHNOLOGY Peva-600I Evaporator is a reliable, efficient, and powerful air-conditioning and refrigeration model. It is an ideal solution for industrial applications which require a secure, robust, and reliable air-cooling equipment that operates with minimal electricity consumption. The unit offers high efficiency, durability, and safety, as well as easy installation and maintenance.
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