Used AST / ADVANCED SYSTEM TECHNOLOGY Peva-600I #9263379 for sale
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ID: 9263379
Vintage: 2010
E-Gun evaporators
System frame with clad panels
Mounting frames
Rack cabinet for control units, 19"
Mains and safety elements with emergency shut-down
Deposition chamber
Single walled: 304L Stainless steel and electro-polished
Semi rectangular pipes dimension for cooling: 630 x 850 mm
Front opening / closing door
With automatic electro-magnetic lock / unlock
Viewport diameter front door, 4.0"
Optically reflector
Shielding parts
Baseplate:
6 Holes diameter, 1"
High voltage
Sweep signal
Crucible index drive
E-gun body cooling
Shutter drive feed through
Sidewall:
Rectangular flange for HV valve: 16" x 11"
KF 40 Flange for heating power feed through
(3) KF 25 Flanges for thermocouple feed through and ion gauge head
(3) KF 16 Flanges for venting valve and pirani gauge head
35 CF Flange
Top plate:
Fitting gas inlet feedthrough: 1 Hole 1" dia
Rotation drive and quartz sensor feedthroughs: 1 Hole 5" dia
Deposition chamber pumping system and vacuum measurement:
CTI-CRYOGENICS Torr-10 Pump, 10"
CTI-CRYOGENICS 9600 Liquid helium cryogenics water-cooled compressor
Auto-regeneration function for cryo pump
GP 307 Vacuum gauge controller: ATM ~5.0E-10 torr
GP 274 Ion gauge head: 1.0E-02 torr ~1.0E-09 torr
(2) GP 275 Pirani heads with tungsten filament: ATM ~5.0E-04 torr
Accessories for substrate stage:
Substrate carrier rotary driver
Substrate carriers
Substrate heating
Accessories of process sources:
JOEL JST-3F Electron beam evaporator
Type: JEBG-203UA
Source with deflection: 270°
Uniform energy distribution
High speed scanning
Water cooling feed through
X and Y Sweep signal feed through
Single crucible 20 cc
Remote control
Shutter drive
Gas inlet systems
Process controller / Layer thickness measurement:
MAXTEK MDC-360C Layer thickness
Rate and process control unit
Process control: RS-232 Interface
Multi-film and multi-process storage: Up to (99) materials
2010 vintage.
AST / ADVANCED Equipment TECHNOLOGY Peva-600I evaporator is an advanced technology industrial evaporator designed for the highest efficiency and performance. This evaporator is designed for a variety of industrial applications that require efficient evaporation, such as thermal cooling, distillation, and condensation. AST Peva-600I evaporator operates on a high-pressure closed-loop system, which utilizes a heating and expanding vapor to evaporate and condense the working fluid. This ensures maximum efficiency and product quality while significantly reducing energy consumption. Its high pressure capabilities allow it to run at much higher pressures than other evaporators. ADVANCED Unit TECHNOLOGY PEVA 600I evaporator is constructed of a sturdy, stainless steel frame and has a number of custom features that can be designed according to the customer's requirements. It includes a high-quality, corrosion-resistant, sealing machine to ensure a reliable performance. To ensure the highest efficiency of Peva-600I evaporator, a number of innovative features have been included. The evaporator is equipped with a high-quality, low-pressure regulating valve that is designed to optimize the flow of feed liquid for maximum efficiency. It also includes an adjustable pressure gauge that allows for precise adjustment of the pressure, allowing for optimum speed and performance. The easily operated AST PEVA 600I evaporator also includes a high-efficiency heat exchanger and a highly efficient condensing tool that can be easily adjusted using a built-in control asset. The adjustable plate heat exchanger can be used to generate product at maximum temperatures. PEVA 600I evaporator is designed for easy operation and installation, with minimal maintenance requirements. Maintenance is limited to regular cleaning and lubrication of parts and components and periodic replacement of any worn parts. AST / ADVANCED Model TECHNOLOGY PEVA 600I evaporator is designed to provide high-performance industrial solutions that require efficient evaporation and condensation of fluids. It is ideal for laboratories, food processing, distillation, and cooling applications. With its superior design construction and advanced features, this industrial evaporator provides superior performance and reliability and is a cost-effective solution for industrial applications.
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