Used BALZAR Vacuum Chamber #293813613 for sale
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ID: 293813613
Stainless construction
Control system: IDEC FC6A PLC with a 13” touch screen
Busch dry pump
2200 CT Leybold turbo pump
Mag drive controller
CT 10 Cryo pump
Cryo pump compressor
Gas control:
MKS Type 247 four-channel controller
(4) 20 SCCM MKS mass flow controllers (MFCs)
Vacuum valving
Ion source: 22 cm PPG linear ion source with screen, accelerator, and decelerator grids
Turntable: 32.5” stainless steel plate with programmable stepper motor drive
Ion probe: graphite block with positive VDC bias and motorized beam scanning
Pressure measurement:
(275) Сonvection gauges
Pfeiffer PKR 251 Pirani cold cathode gauges
Pfeiffer TPG 362 controller.
BALZAR Vacuum Chamber is a critical component in the field of vacuum evaporation, commonly used in thin film deposition processes in various industries such as semiconductor fabrication, optical coatings, and materials research. This sophisticated equipment enables the precise deposition of thin films by evaporating a source material in a controlled vacuum environment onto a substrate surface, resulting in a range of functional coatings with specific properties. Vacuum Chamber is designed to create and maintain a high vacuum level to facilitate the evaporation process effectively. It consists of a sealed enclosure that houses the source material, substrate, and evaporation mechanism, allowing for the controlled introduction of the vaporized material onto the substrate. The chamber is typically made of high-quality materials such as stainless steel or aluminum to ensure durability, longevity, and resistance to corrosion. One of the key features of BALZAR Vacuum Chamber is its advanced pumping equipment, which is responsible for establishing and maintaining the required vacuum level within the chamber. The pumping system typically includes a combination of primary and secondary pumps, such as rotary vane pumps, turbo pumps, and cryogenic pumps, to achieve the desired vacuum pressure for efficient evaporation. These pumps work together to remove gases and other contaminants from the chamber, creating a clean and stable environment for the deposition process. In addition to the pumping unit, Vacuum Chamber is equipped with precise temperature control mechanisms to regulate the evaporation process and ensure uniform film deposition. Temperature control is crucial in evaporative processes as it influences the vaporization rate of the source material and the properties of the deposited thin film. The chamber may include heating elements, water cooling systems, or thermal sensors to achieve accurate temperature control and optimize film quality. Furthermore, BALZAR Vacuum Chamber is integrated with sophisticated monitoring and measurement tools to monitor key process parameters in real-time. These tools may include pressure gauges, mass spectrometers, optical emission spectrometers, and film thickness monitors to analyze the vacuum level, gas composition, and film thickness during the evaporation process. Continuous monitoring and feedback mechanisms allow operators to adjust process conditions on-the-fly and ensure consistent and reproducible thin film deposition. Vacuum Chamber also incorporates safety features and interlocks to protect operators and equipment during operation. These safety mechanisms may include overpressure relief valves, emergency shutdown systems, and automated fail-safe protocols to prevent accidents and equipment damage in case of unexpected events. Additionally, the chamber may be equipped with advanced automation controls and remote monitoring capabilities for increased efficiency and productivity. Overall, BALZAR Vacuum Chamber is a sophisticated evaporator machine that plays a crucial role in thin film deposition applications across various industries. With its advanced design, precise control, and efficient operation, this equipment enables researchers and manufacturers to achieve precise and high-quality thin film coatings with tailored properties for a wide range of applications.
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