Used CHA E 1000 #9203953 for sale
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ID: 9203953
E-Beam evaporator
Non load-lock system:
Minimum (4) target pockets
Load-lock system:
Minimum (6) target pockets
Ion mill capability with argon
Ion beam power: 10kW
Capable of handling batch sizes: ≥ 3"x 6" wafers
System base pressure: 3x10^-7 Torr
Chamber pump down rate to base pressure: Under 60 minutes
Lift off dome and planetary holder
Wafers that is easily switched out
Multiple recipe system controller to auto control deposition rate
Load lock preferred
CPA E-1000 evap system featuring:
Load lock: No
(4) Pockets crucible (25CC) with indexing controller
TEMESCAL CV-14 14KW E-beam power supply
Controller: GP 307 I.G
Shutter assembly
INFICON Deposition sensor assy
Observation port
Lift-off fixture
One button operation:
CHA controllers
TELEMARK 880 / 861 Dep rate controller
TEMESCAL Sweep controller
CTI CT-10 Cryo pump with 8500 compressor
Mech pump
EOM Specifications
Shielding
System manuals on CD
Specification:
O-rings
Chamber
CV-6S Power supply
Valves
Bearings
Cryo pump and compressor
System leak checked using RGA
All controllers inspected and
Wiring checked and problems
Shielding and planets
Options:
Ion mill
Rear mount
CV-6 PS With ps
Rewire
TELEMARK ST-10 Power supply
5CM Ion gun with power supply.
CAE 1000 is a high-efficiency evaporator designed for industrial refrigeration applications. It is a compact single-stage unit with a capacity of up to 1000kg/h in ammonia and 850 kg/h in propane. The evaporator is constructed with a stainless steel body and a copper tube/aluminium tube plate at the head, allowing for lower maintenance and better durability. Additionally, E 1000 is designed with a multi-pass refrigerant expansion equipment providing better superheat control and improved heat transfer efficiency. The evaporator has advanced features such as an electronically commutated (EC) fan motor and a sound-attenuating enclosure for lower noise levels. The EC fan motor provides adjustable speed to better control the system's operation. This helps optimize energy efficiency and also eliminates the need for starting and stopping the fan motor, as it simplifies commissioning procedures and maintenance operations. The sound-attenuating enclosure provides up to 3dB(A) noise reduction, allowing CAE 1000 to meet or exceed noise pollution guidelines. The evaporator is designed with a stainless steel internal piping unit and thermal expansion valves for better control over the refrigeration cycle. The staggered tube arrangement for enhanced heat transfer and maximum surface contact between the refrigerant and the exhaust gas also provides improved thermal efficiency. The evaporator is also designed with a mountable shelving frame which can be used for additional components such as oil sumps, accumulators, and drier filters. E 1000 is designed with a wide range of connecting ports and accessories that allow for flexible installation and simplifies maintenance of the machine. Additionally, with a maximum operating pressure of 2.2 bars, the unit can operate safely and reliably in demanding environments. Overall, CAE 1000 is an advanced evaporator designed for maximum efficiency and longevity, providing dependable performance in even the most demanding industrial refrigeration applications.
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