Used DENTON VACUUM Explorer 14 #293774927 for sale

ID: 293774927
Sputtering system Deposition chamber: Chamber and control cabinet 304L Stainless steel chamber (14" wide x 18" tall) Substrate size capability: 100 mm Ø Magnetron capability: Up to 3" target diameter Internal chamber deposition shield Deposition chamber pumping: Turbo pump and controller range: 620 l/s EDWARDS XDS10 Dry scroll pump High vacuum 3-Position gate valve Vacuum gauging and process gas control: Pirani/Bayard-Alpert gauge transmitter/Bayard-Alpert gauge transmitter Ceramic capacitance manometer: 1 TORR FS (2) Mass flow controller (Ar and N2) MKS Controller Sputter sources: (3) 2.0" Diameter, internal "stalk-mounts" (3) Flex type, planar magnetron sputter sources Direct cooled for Ti (3) Independent electro-pneumatic cathode shutters Control and automation: Color touch panel control and graphical status display Multimode capabilities: Auto pump, auto vent, manual, automatic Substrate stage: RF Bias DVI RF Bias, 100 mm substrate stage assembly RPM: 0-20 Sputter power supplies: DC Power supply: 1 kW RF Power supply: 300 Watt DC Switch A/B select.
DENTON VACUUM Explorer 14 is an advanced thin film deposition equipment commonly known as an evaporator. This cutting-edge instrument is designed to create thin films of various materials through the process of physical vapor deposition (PVD) in a high vacuum environment. Explorer 14 is manufactured by DENTON VACUUM, a leading supplier of thin film deposition equipment known for its innovative technologies and superior performance. DENTON VACUUM Explorer 14 is equipped with a wide range of features and capabilities that make it ideal for research and industrial applications in areas such as microelectronics, optics, and materials science. The system is designed for precise control and uniformity of thin film deposition, enabling researchers and engineers to achieve high-quality films with excellent adhesion and uniform thickness. One of the key features of Explorer 14 is its versatile deposition sources, which include resistive thermal evaporation sources, electron beam evaporation sources, and sputter sources. These sources allow users to deposit a wide variety of materials, including metals, oxides, and nitrides, with exceptional control over deposition rates and film properties. The unit is also compatible with multiple substrate sizes and shapes, making it suitable for a wide range of sample types and applications. DENTON VACUUM Explorer 14 is equipped with advanced vacuum pumping and pressure control systems to create and maintain the high vacuum conditions required for thin film deposition. The machine includes a high-speed turbomolecular pump and a dry scroll pump, which work together to achieve and maintain a base pressure in the ultra-high vacuum range. Precise pressure control is facilitated by a sophisticated gas flow control tool that allows users to adjust the gas flow rates and composition during the deposition process. Explorer 14 features a user-friendly interface and software control asset that enable easy operation and monitoring of the deposition process. The model can be programmed to execute complex deposition sequences automatically, allowing users to create customized deposition recipes for specific film structures and properties. Real-time monitoring of deposition parameters such as deposition rate, film thickness, and substrate temperature is provided through the equipment's intuitive software interface. In addition to its advanced capabilities for thin film deposition, DENTON VACUUM Explorer 14 is also designed for ease of maintenance and serviceability. The system includes ergonomic design features such as easy access to deposition sources and vacuum components, as well as a modular construction that simplifies component replacement and upgrades. DENTON VACUUM provides comprehensive technical support and training to help users maximize the performance and uptime of Explorer 14. Overall, DENTON VACUUM Explorer 14 is a state-of-the-art thin film deposition unit that offers exceptional performance, versatility, and ease of use for a wide range of research and industrial applications. With its advanced features and capabilities, Explorer 14 is a valuable tool for researchers and engineers looking to create high-quality thin films with precise control and reproducibility.
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