Used EDWARDS Auto 306 #293755228 for sale
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ID: 293755228
Vintage: 2006
Thermal evaporator
Type: StandAlone Indium Coater
Workholder: 260mm
Turbo molecular pump, 250 l/s
High vacuum isolation valve
Liquid nitrogen cold trap, fitted below high vacuum valve
RV 12 2-Stage 14.2 m³/h rotary pump
Foreline trap
Oil mist filter
PLC operated automatic vacuum control system with touch screen display
Vacuum measurement:
Active penning gauge head
(2) Active Pirani gauge heads
PN: E09090000 Vacuum chamber
FL400 Stainless steel front - loading high vacuum chamber
400mm Diameter by 500 high with viewport in chamber door
With removable chamber top plate with (6) vacuum penetrations, 1"
Evaportaion sources:
(2) Current source clamps
High current evaporation source clamps capable of holding resistance evaporation sources
Tungsten basket heater with ceramic crucible
(2) Extended water-cooled high current lead throughs
Radiation shield: PN E09035000
LT/HT current controller with selector switch
Ammeter to display evaporation current: PN E09063000
LT Transformer with two outputs: 5V, 200A and 10V, 100A
Complete with (2) vacuum lead throughs and cables
Source shutter: PN E09032000
Type: Manual
Work holder: PN E09049000
Rotary work holder fitted in chamber top plate
Aluminium work holder plate: 260mm diameter
Uniformity over wider areas, 360°
Complete with DC motor
Speed control panel for variable rotation speeds in range 20RPM to 60RPM.
Film thickness measurement: PN E08669000
Model: FTM7 quartz crystal film thickness deposition monitor
Digital display of deposition rate and deposition thickness
Information storage for 11 sputtering materials
RS232 interface to enable data logging and programming from PC
PN: E08667000 Quartz crystal sensor head with (5) spare crystals
Power: 208 V, 60 Hz, 25 A
2006 vintage.
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