Used ELETTRORAVA PECVD Clustertool system #293756310 for sale

ID: 293756310
Vintage: 2011
(5) Chambers Working hours: 1000 Hours Loadlock chamber Dimensions : 300 mm diameter x 350 mm height DN160CF port Substrate holders: DN160ISO DN200CF DN25KF DN40CF DN40KF Substrate: 100 mm x 100 mm Pumping speed: 27 m3/h N2 / 330 l/sec He / 340 l/sec H2 / 300 l/sec Water cooled Control unit ETC300 Rotational speed: 42000 RPM Inlet screen Gas / MFC Size: SiH4 / 100 SCCM CH4 / 100 SCCM NH3 / 200 SCCM N2O / 100 SCCM H2 / 200 SCCM 304 Cylindrical transfer chamber Diameter: 600 mm Height: 270 mm Pump mileage: 1,000 Hours Ultra high vacuum Maximum nominal heater temperature: 750°C Maximum substrate temperature: 400°C Turbomolecular pumps elettrorava ETP300GCR RF Generator Mount gas cabinet SS tubing Safety interlock Frequency 13.56 MHz Power supply: 300 W 2011 vintage..
ELETTRORAVA PECVD Clustertool equipment is a sophisticated piece of equipment used in the semiconductor industry for the deposition of thin films through the Plasma-Enhanced Chemical Vapor Deposition (PECVD) process. This system is designed to enable high-throughput production of thin films with precise control over film thickness, composition, and uniformity, making it ideal for applications in advanced microelectronics, photovoltaics, and other high-tech industries. At the heart of PECVD Clustertool unit is the cluster architecture, which allows for the integration of multiple process modules within a single platform. This modular design enables the machine to perform a series of sequential processes, such as film deposition, plasma cleaning, and metrology, without the need for manual intervention or transfer between different tools. The cluster configuration also improves the overall tool efficiency by minimizing downtime and increasing throughput. One of the key components of ELETTRORAVA PECVD Clustertool asset is the PECVD chamber, where the thin film deposition process takes place. This chamber is equipped with a variety of high-precision features, including temperature control systems, gas flow controllers, and plasma sources, to ensure the deposition of films with uniform thickness and desirable properties. The PECVD chamber is typically operated under vacuum conditions to prevent contamination and ensure the reproducibility of film properties. The deposition process in PECVD Clustertool model involves the introduction of precursor gases into the PECVD chamber, where they are activated by a plasma source to generate reactive species that react and deposit onto the substrate surface. The plasma source can be powered by radiofrequency (RF) or microwave energy, depending on the specific requirements of the deposition process. By controlling the process parameters, such as gas flow rates, temperature, and plasma power, users can tailor the properties of the deposited films to meet the desired specifications. In addition to the PECVD chamber, ELETTRORAVA Clustertool equipment also features auxiliary modules for pre- and post-processing steps, such as substrate cleaning, surface treatment, and film characterization. These modules can be seamlessly integrated into the cluster architecture, allowing for a fully automated and controlled deposition process from start to finish. The system is also equipped with advanced software controls that enable users to program and optimize the deposition process for different materials and film structures. Overall, ELETTRORAVA PECVD Clustertool unit represents a state-of-the-art solution for thin film deposition applications that require high precision, repeatability, and throughput. Its advanced cluster architecture, PECVD chamber design, and integration of auxiliary modules make it a versatile tool for a wide range of industries seeking to develop advanced materials and devices. With its ability to deposit films with precise control over properties and uniformity, this machine is well-suited for leading-edge research and production environments where superior film quality is paramount.
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