Used ELETTRORAVA PECVD Clustertool system #293756310 for sale
URL successfully copied!
Tap to zoom
ID: 293756310
Vintage: 2011
(5) Chambers
Working hours: 1000 Hours
Loadlock chamber
Dimensions : 300 mm diameter x 350 mm height
DN160CF port
Substrate holders:
DN160ISO
DN200CF
DN25KF
DN40CF
DN40KF
Substrate: 100 mm x 100 mm
Pumping speed:
27 m3/h
N2 / 330 l/sec
He / 340 l/sec
H2 / 300 l/sec
Water cooled
Control unit ETC300
Rotational speed: 42000 RPM
Inlet screen
Gas / MFC Size:
SiH4 / 100 SCCM
CH4 / 100 SCCM
NH3 / 200 SCCM
N2O / 100 SCCM
H2 / 200 SCCM
304 Cylindrical transfer chamber
Diameter: 600 mm
Height: 270 mm
Pump mileage: 1,000 Hours
Ultra high vacuum
Maximum nominal heater temperature: 750°C
Maximum substrate temperature: 400°C
Turbomolecular pumps elettrorava ETP300GCR
RF Generator
Mount gas cabinet
SS tubing
Safety interlock
Frequency 13.56 MHz
Power supply: 300 W
2011 vintage..
ELETTRORAVA PECVD Clustertool equipment is a sophisticated piece of equipment used in the semiconductor industry for the deposition of thin films through the Plasma-Enhanced Chemical Vapor Deposition (PECVD) process. This system is designed to enable high-throughput production of thin films with precise control over film thickness, composition, and uniformity, making it ideal for applications in advanced microelectronics, photovoltaics, and other high-tech industries. At the heart of PECVD Clustertool unit is the cluster architecture, which allows for the integration of multiple process modules within a single platform. This modular design enables the machine to perform a series of sequential processes, such as film deposition, plasma cleaning, and metrology, without the need for manual intervention or transfer between different tools. The cluster configuration also improves the overall tool efficiency by minimizing downtime and increasing throughput. One of the key components of ELETTRORAVA PECVD Clustertool asset is the PECVD chamber, where the thin film deposition process takes place. This chamber is equipped with a variety of high-precision features, including temperature control systems, gas flow controllers, and plasma sources, to ensure the deposition of films with uniform thickness and desirable properties. The PECVD chamber is typically operated under vacuum conditions to prevent contamination and ensure the reproducibility of film properties. The deposition process in PECVD Clustertool model involves the introduction of precursor gases into the PECVD chamber, where they are activated by a plasma source to generate reactive species that react and deposit onto the substrate surface. The plasma source can be powered by radiofrequency (RF) or microwave energy, depending on the specific requirements of the deposition process. By controlling the process parameters, such as gas flow rates, temperature, and plasma power, users can tailor the properties of the deposited films to meet the desired specifications. In addition to the PECVD chamber, ELETTRORAVA Clustertool equipment also features auxiliary modules for pre- and post-processing steps, such as substrate cleaning, surface treatment, and film characterization. These modules can be seamlessly integrated into the cluster architecture, allowing for a fully automated and controlled deposition process from start to finish. The system is also equipped with advanced software controls that enable users to program and optimize the deposition process for different materials and film structures. Overall, ELETTRORAVA PECVD Clustertool unit represents a state-of-the-art solution for thin film deposition applications that require high precision, repeatability, and throughput. Its advanced cluster architecture, PECVD chamber design, and integration of auxiliary modules make it a versatile tool for a wide range of industries seeking to develop advanced materials and devices. With its ability to deposit films with precise control over properties and uniformity, this machine is well-suited for leading-edge research and production environments where superior film quality is paramount.
There are no reviews yet