Used LEYBOLD HERAEUS L 560 #9094443 for sale
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ID: 9094443
Wafer Size: 4"-6"
E-Beam Evaporator, 4"-6"
Unit can deposit (8) each 4" substrates simultaneously
Or (5) each 6" substrates
Vacuum chamber nonmagnetic stainless steel
Inner diameter: ~ 550 mm
Chamber with frame: 1,810 x 830 x 1,200 mm
Control cabinet: 1,810 x 570 x 810 mm
High-vacuum pumping system
Turbo-molecular pump: TURBOVAC 1000
Pumping speed for N2: 1,000 liter/s
Rotary vane pump: TRIVAC D65B
Pumping speed: 65m³/h
LN2 cooling trap
Consumption: ~ 1 liter/h
Viewing baffle: Automatic pumping-system control
Vacuum gauges
Fore-vacuum meter: TM220S 10-³ to 10³ mbar
High-vacuum meter: IM 210 10-9 to 10-³ mbar
E-beam source:
E-beam gun: ESV 6-270, 4 kW
E-beam evaporation source with 4 pockets
Diameter of 1 pocket: ~ 20 mm
Glow Discharge Unit for pre-cleaning
(1) Holder for quartz microbalance crystal
Inficon deposition controller XTC/2 connected to crystal unit
(2) Thermal Evaporators with shutters
(3) Gas-flow meter with MKS MFCs
Chamber:
Carousel diameter: 450 mm
Chamber size: 560 W x550 D x 580 H mm
Vacuum Pumps:
TRIVAC D65, RUVAC WS251 and Leybold Turbopump Turbovac 1000 with 1000/1500 Turbotronic
Cooling system:
Water cooling of e-beam source
Cooling water lines placed around the chamber
Heating system:
No water heating of the chamber
Includes equipment for wafer and chamber heating
Substrate Holder:
Holder can be chosen to rotate during the whole process.
LEYBOLD HERAEUS L 560 Evaporator is a high-efficiency, automatically controlled evaporator designed for thermal evaporation of organic materials and aqueous solutions. L 560 uses an evaporation chamber, providing a unique deposition technique allowing for the finely controlled and efficient thermal decomposition of volatile and semivolatile compounds. The evaporator features a low-cost, highly efficient evaporator design that minimizes the risk of product contamination. LEYBOLD HERAEUS L 560 features automatic temperature and pressure settings combined with a simple, intuitive operation, allowing users to quickly set up the evaporator for each experiment. As the evaporator is pre-defined for a specific material, users can easily replicate evaporation processes and quickly match their set up to their research or application needs. A simple and easy-to-use equipment allows users to quickly adjust settings on the fly from the instrument's display. L 560 features a stationary glass evaporator column and an adjustable heating plate to regulate heating and product throughput. The evaporator's high-power, low-voltage heating plate ensures the evaporation of a wide range of materials, while protecting the system from current overloads. The adjustable heating plate allows users to precisely control the oven temperature, allowing for repeatable evaporation processes. LEYBOLD HERAEUS L 560 also offers an ergonomic and highly reliable ventilation unit, allowing for the extraction of heat and fumes from the evaporator chamber and efficiently transferring them to one of two readily accessible ducts. An adjustable air flow regulator provides users with a high level of control over the rate of evaporation, ensuring uniform drying and drying temperatures. Additionally, a flexible machine of flexible ducts ensures quiet operation and air circulation within the evaporator. L 560 is equipped with an advanced filtration tool, which filters the atmosphere through two strainers, collecting dust and particulates before they reach the evaporator chamber. This advanced filtration asset ensures the safety of combustible materials, as well as ensuring safe operation. A wide variety of accessories are available for LEYBOLD HERAEUS L 560, including samples holders, sample trays, evaporator flasks, and more, ensuring users have everything they need for successful and repeatable evaporation processes. No matter the application, L 560 offers highly reliable thermal evaporation of organic materials and aqueous solutions.
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