Used MAZAK / KOREA VACUUM TECH VTC 1400 #293662587 for sale
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ID: 293662587
Vintage: 2004
System
(2) Shutters
(3) Turbo pumps
(6) Pockets
Boat
Joule effect source
Quartz heater
Ion gun mark II
EDWARDS Rotary pump, 175 m³/h
LEYBOLD VAC T1600 Turbo pump
Rough pump, 180 m³/h
FERROTEC EVM10 EB Gun, 5 Kw
POLYCOLD PFC 552 HP Water vapor cryopump
Diameter: 1200 mm
2004 vintage.
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