Used ULVAC EBX-1000 #9313807 for sale

ULVAC EBX-1000
Manufacturer
ULVAC
Model
EBX-1000
ID: 9313807
Vintage: 2003
Deposition system 2003 vintage.
ULVAC EBX-1000 is a high-quality evaporator designed for high-precision thin film deposition. It utilizes a turbo-molecular pump which keeps a pressure of 10-6 to 10-7 fixed to ensure homogeneity of the deposition. The physical vapor transport is realized by either a crucible source, an electron beam source or a multi-source combination. The dedicated vacuum chamber is designed in a compact integration platform compatible with a transfer system. ULVAC EBX1000 evaporator consists of an evaporation chamber, turbo molecular-pump, and a deposition-monitoring instrument. The evaporation chamber is made of stainless steel and equipped with a gateway flange, facilitating the transfer of materials from the crucible, electron beam source or multi-source. The chamber is hardened and features different levels of micro-chemistry protection. Moreover, EBX 1000's turbo molecular pump is constructed to provide high precision control of the pressure during evaporation. The built-in true rotary throttle valve adjust precisely the pump-down time. In addition, the low-vacuum booster pump and mechanical pump are used to evacuate the big-load residual gas efficiently. The deposition-monitoring instrument allows precise control of the vapor deposition rate under precision condition. It can be used to monitor the thickness of the deposited film in real-time. It is designed to monitor all kinds of metals, insulators and organic compounds. The instrument also features different sets of parameters for controlling the target thickness, deposition speed, and over/under deposition. Furthermore, different thermal parameters can also be monitored, ensuring efficient and rapid delivery of material deposition. In conclusion, EBX1000 evaporator is a high-precision, high-quality device designed to make high-precision thin film deposition possible. It features a compact integration platform, is hardened with a stainless steel chamber, and can be used to monitor all kinds of materials for efficient vapor deposition. With its built-in true rotary throttle valve, low-vacuum booster pump, and depostion-monitoring instrument, ULVAC EBX 1000 provides efficient and precise vapor deposition.
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