Used ULVAC EBX-10C #293649865 for sale

Manufacturer
ULVAC
Model
EBX-10C
ID: 293649865
Vintage: 1982
Vapor deposition system Chamber: 650×800 mm (3) Resistance heating (Front door type) Vacuum gauge Film thickness gauge with revolving jig Required cooling water: 2kg/cm²G (10ℓ/min) Required air pressure: 5kg/cm²G Substrate holder size: 430 mm Effective deposition range: 350 mm 1982 vintage.
ULVAC EBX-10C is a high performance evaporator designed to provide a cost-effective and efficient evaporation process for applications such as thin film deposition and surface treatment. The evaporator is well-suited for advanced research, development, and production processes. This evaporator features a ULVAC X-Series Platinum-Plated Electrodes and the patented EBX (EVAPoration Bias eXchange) process. This patented technology allows the evaporator to perform high-speed evaporations with a minimum amount of input energy and achieves high uniformity in the deposited film. The high uniformity in the deposition rate allows for higher product yields, faster process times, and high performance. EBX-10C is composed of a vacuum-tight stainless steel main body and a reliable robust vacuum equipment. The vacuum system features a turbomolecular pump, a vacuum gauge, a vacuum regulator, and an oil mist filter. This unit allows for a stable vaporization process and reduces the build up of contaminants. The evaporator is equipped with a high-precision mass-flow controller and heater that allow for accurate temperature control during the film deposition process. The mass-flow controller ensures precise monitoring of the heat input and the film thickness, enabling product consistency. The evaporator is also equipped with a thermocouple feedback machine which monitors the deposition rate in order to maintain precise substrate temperature control. ULVAC EBX-10C is also equipped with an automated programmable logic controller (PLC) which allows for automated control of the evaporator. The PLC tool provides precise control over the heating rate, vacuum parameters, and film thickness. This precise control provides uniform deposition and avoids over-deposition or under-deposition, resulting in higher performance and quality control. The evaporation asset of EBX-10C is contactless, providing better deposition performance and improved safety. The evaporator is designed to keep maintenance to a minimum, as it has no metal-to-metal contact points and requires no additional cleaning, allowing for easy maintenance and long lifetime performance. To summarise, ULVAC EBX-10C is an advanced high performance evaporator designed for efficient thin film deposition and surface treatment. The evaporator features a robust vacuum model, high-precision mass-flow controller, and a dynamic thermocouple feedback equipment that allows for precise temperature control and uniform deposition. Thanks to its PLC system, EBX-10C is also capable of automated control and provides superior repeatability, enabling higher product yields and better control of the process.
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