Used ULVAC EBX-10D #162906 for sale

Manufacturer
ULVAC
Model
EBX-10D
ID: 162906
Wafer Size: 4"
Vintage: 1981
Resistance evaporator, 4" 2 planetaries, one 4" and one 3" Electrodes are configured to handle up to 4 sources Have used this to evaporate gold, silver, palladium etc. Equipment is currently installed Diffusion pump included Spares are also included 1981 vintage.
ULVAC EBX-10D is an evaporator for low-vacuum applications. It is an all-in-one tool for deposition control, evaporation speed, particle size and geometrical arrangements of an evaporated layer. This evaporator has a maximum evaporation rate of 10 g/min and its working area is 80mm long x 90mm wide. It is equipped with an electric heat resist heater, a variable temperature controller and a deposition controller. It has a patented induced electric-field plasma source for minimizing particle enlargement and uniform evaporation rate distribution. This EBX-10D is an ideal tool for evaporation rate control, especially when a wide range of evaporation rates is necessary. The electron beam generated by the induction electric-field plasma source uses a scanning range of up to 80 x 90 mm and reliable AC electric power supply within 0 to 5.5 kW. It also has a timer function and a variable-angle geometrical arrangement for better deposition control. ULVAC EBX-10D also has an advanced control system which measures the evaporation rate and the particle size as soon as the process starts. This feature helps in accurate deposition control and helps avoid cold spots during the deposition process. It also has a double pre-heating mode which ensures uniform temperature distribution across the entire sample and helps to reduce the evaporation time and cost. Apart from evaporation rate and particle size control, this evaporator has a rapid autovalve switching feature. This feature helps to reduce contamination and enables quick vacuum cycling. This helps to neutralize charging particles present on the surface of the sample. EBX-10D also has a vacuum regeneration filter, which enables quick evacuation and stabilization of the vacuum as well as better results in thinner film applications. Finally, ULVAC EBX-10D has a Smart Mode operation which helps to minimize downtime, ensure uninterrupted operations, and reduce energy consumption. The user-friendly graphical interface of this evaporator provides an easily understandable interface to control various operational details. The device is also compatible with various types of accessories like substrate holders, evaporation source holders and gas mixing systems. This ensures safety and improved working efficiency for the user. Thus, EBX-10D is a reliable and efficient evaporator for low-vacuum applications.
There are no reviews yet