Used ULVAC Satella #9160531 for sale

Manufacturer
ULVAC
Model
Satella
ID: 9160531
Vintage: 2006
Vacuum evaporation system Cluster tool Substrate size: 185mm x 235mm x 0.7mmt Tact time: 30 minutes Applications: R&D, device prototypes System configuration: Pre-processing →Hole layer→Luminescent layer (R→G→B) →Electrode layer→ Sealing (manual) Organic deposition processes Multiple independent chamber Full-color device production Difficult application for Solciet 7-Sided transfer chamber Support 2 to 4 organic deposition chambers High-precision mask alignment mechanism for active-matrix full-color devices Currently de-installed 2006 vintage.
ULVAC Satella is an innovative sputter equipment used for thin film deposition. The system has a unique configuration which consists of an RF magnetron sputtering source and a gas-powered ion source placed in a horizontal plane. The unit produces high quality, uniform films which are used in a variety of industrial, medical and analytical applications. The machine incorporates a radio frequency (RF) magnetron sputtering source which is mounted to the base of the main body. This source enables the deposition of conductive films at a high rate. The ion source, which is powered by a high voltage (HV) gas source, is positioned in a vertical plane. This allows for simultaneous ion bombardment of the metallic targets, enabling smooth, clean surface coating. Satella is well-suited for forming hard coatings on metal substrates due to its efficient design and high-performance material processing capabilities. The tool has excellent control over material ionization, making it ideal for workpiece coating applications. The ion source produces highly-focused beams even at extremely low temperatures, ensuring uniform deposition without the risk of damage. The asset has several user-friendly features, such as a graphical user interface (GUI) for easy operation, as well as automatic deposition of the film layer. It also comes with an assortment of useful features, such as temperature control, pressure regulation and automatic calibration. The model is compatible with many adapters, including robotics, making it suitable for multiple process flow configurations and automation. ULVAC Satella has a fully automatic and programmable sputtering equipment which results in reduced setup times and increased production throughput. It can be used for a variety of thin film deposition processes, including metal evaporation, thin film deposition, semiconductor deposition and ion implantation. Satella is a reliable, user-friendly and cost-effective sputtering system that helps achieve high-quality, uniform films with excellent performance. With its robust capabilities and intuitive design, the unit is a viable option for businesses looking to rapidly improve the quality of their products.
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