Used ADTEC Inprex IP-3600H #9307644 for sale

ID: 9307644
Digital imaging exposure system.
ADTEC Inprex IP-3600H is an industrial-grade exposure equipment designed to produce photomasks or patterned films with precise and repeatable feature registration accuracy. With its advanced automation and compact design, it is an ideal choice for mid-range photomask production. The system is equipped with a 300mm/12 inch mask size platform for direct-write photomasks or photomask patterns, as well as a 200mm/8 inch platform for film exposure. It has a high resolution, projection lens coupled with a high-precision drive unit that ensures high-quality results with minimal drift and feature registration errors. Inprex IP-3600H features a range of exposure techniques such as step and repeat, single shot, and multi-level patterning, allowing users to produce high-quality patterns with intricate and complex design geometries. It also features a built-in image editor for pre-exposure pattern modifications, enabling users to make any minor adjustments to the pattern. The machine is designed to handle a wide variety of substrates, such as quartz, silicon wafers, resist-coated wafers, glass and ceramics. The substrate is mounted on an automated dual-stage substrate stage with a three-axis rotation mechanism to provide precise, repeatable, and reproducible exposure results. Its advanced optics and wafer management tool optimize exposure quality, throughput, and yield. ADTEC Inprex IP-3600H also features a CD/Linewidth capability down to 0.2µm and a flexible resolution down to 4µm and exposure fluences ranging from OEM curves to optimized exposures. Its fast scanning capability makes it especially suitable for high-throughput mask production. Its intuitive user interface and a wide range of automation capabilities make it suitable for both manual and automated operations. Overall, Inprex IP-3600H is an advanced, high-performance exposure asset with robust features and automation capabilities that make it an ideal choice for high-precision photomask and patterned film production.
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