Used AXCELIS / FUSION 150PC #9061421 for sale

AXCELIS / FUSION 150PC Exposure Equipment is a highly advanced, automated solution for the processing of reticles and other substrates. This system is capable of delivering photoresist, layer level, metal, etch, inspection and other processing stages in a single exposure tool. It provides an unparalleled level of throughput, reliability, repeatability, and process control. The unit is based on a modular, multi-zone design concept. This allows the machine to be adapted according to the specific needs of the user. It is highly versatile and can be configured both as a low-cost single-point tool or as a full-featured dual-point asset with multiple exposures of each substrate layer. The model enables the operation in both the batch and in-line modes, allowing the user to optimize their throughput and process variations. The equipment comes complete with all necessary components including the high-intensity UV source, all lenses and optical components, and the image enhancer. The system is designed to provide a high degree of process control and repeatability. The Integrated Exposure Control Unit (IECS) creates a virtual layer within the machine software, which can store and adjust parameters for each recipe. This allows the user to precisely control and optimize the process parameters for each layer. The machine also features a state-of-the-art lithography suite. The software is designed to manage and automate the lithography process, from the preparation and editing of the design all the way through to the fine-tuning of the exposure parameters. The software also includes a suite of monitoring and analysis tools, allowing the user to monitor process conditions and analyze results in real time. The tool also offers a set of advanced microscopy capabilities. It can integrate with live broadcast cameras for capturing high-resolution images or 3D models. It can also be configured with a range of magnifications to facilitate the examination and analysis of lithographic features. Finally, the asset is designed to provide exceptional automation performance. An automated stage traversal capability allows for rapid processing of multiple substrates simultaneously. In addition, the model's intuitive user interface and robust robotics allow for easy operator control, making it faster and easier to operate the equipment. Overall, FUSION 150PC Exposure System is a highly sophisticated, multi-faceted solution that offers the highest level of accuracy and reliability for the processing of reticles and other substrates. The unit is designed to provide maximum performance, scalability, automation, and process control. With its highly adaptable and flexible architecture, it is the ideal solution for any lithographic process.