Used AXCELIS / FUSION 150PC #9302854 for sale

AXCELIS / FUSION 150PC is an exposure equipment designed for photolithography processes used in semiconductor device fabrication. It is engineered by FUSION Technologies, a leader in the field of advanced process technology solutions. The system utilizes a variable-shaped beam (VSB) pattern generator, which produces focused, precise spots of high-energy UV radiation to expose the desired patterns on photomasks. The unit is capable of high productivity due to its high resolution, large field of view, and multi-layer aerial imaging capabilities. FUSION 150PC has a source power of up to 150 watts and provides optimized projection optics for controlling beam size and shape. It is comprised of a VSB pattern generator, an imaging lens, and a relevant power supply. The imaging lens is designed with multilevel telecentricity, which allows maximum imaging precision. The scalable, self-aligning focusing machine uses a seven-element Galilean optical tool and automated focus control to achieve sub-micron level repeatability. Its high-precision beam positioning asset enables stable, high-speed alignment of the VSB pattern generator and imaging lens to ensure flawlessness. AXCELIS 150 PC has a high resolution of 0.7µm, capable of producing superior images with a wide dynamic range. Its large field of view provides exceptional imaging capabilities for various mask sizes and different circuit patterns. The model also supports multi-layer aerial imaging, enabling high-throughput fabrication of complex 3D structures. Its automatic pattern recognition allows for high accuracy of the pattern recognition process. The equipment is designed with a high-precision alignment system, which is capable of controlling and detecting the positional accuracy of the mask table with an accuracy of 5um. The unit also has advanced safety features such as power shut-off and safety interlock. Additionally, its optical components are integrated with automatic calibration, which reduces the number of manual adjustments. Overall, FUSION 150 PC is a superior UV-exposure machine designed for photolithography processes. It is capable of maximum resolution and high throughput due to its precision beam-forming tool, wide field of view, and multi-layer aerial imaging capabilities. As a cutting-edge photolithography machine, AXCELIS 150PC is an ideal choice for semiconductor device fabrication.