Used AXCELIS / FUSION 200 ACU #9191126 for sale

AXCELIS / FUSION 200 ACU is an advanced, automatic exposure equipment designed to provide precise, repeatable lithographic control of single substrate, multiple substrate, and highly complex substrates. The ACU, designed for the most demanding photolithographic applications, can apply, control and monitor the exposure of a variety of substrates and features, including multiple substrates, with a high degree of repeatability. The system provides a streamline user experience and robust, powerful features for optimizing the lithographic process. The ACU's optimized optical and mechanical design allow usage of long-life, reduced-burning illuminations that are easily and cost-effectively maintained. An efficient quartz halogen lamp delivers reproducible exposures at both high and low illuminations, while an adjustable wafer stage lets the unit quickly change substrates and illuminations during an exposure. In addition, an advanced, adjustable shutter control allows accurate shutter operation and positioning as well as superior shutter calibration. The ACU consists of a mainframe and control unit and an exposure head. The mainframe consists of digital displays and controls, including dial settings for shutter control and aperture settings. The control unit consists of a head controller, wafer digital readouts, and motor-control technology. The mainframe runs advanced software and advanced hardware improvements, and has the capability to store up to 8 exposure programs. With an intuitive user interface, the ACU easily integrates into a wide array of environment designs. An extensive set of lenses, prisms, and mirrors are available to customize the shutter, projection optics, and exposure head to meet lithography requirements. In addition, an automated, integrated real-time diagnostics machine allows performance monitoring and adjustment, which helps prevent downtime and minimize costs associated with installation, recalibration, and recalibration. The ACU offers users a clean, low-maintenance design and a variety of environmental controls, such as temperature-humidity control, electro-magnetic interference (EMI) shielding, and ventilated enclosures. The tool is also compliant with the FDA-approved safety measures for the semiconductor and photolithographic industries. In conclusion, FUSION 200 ACU is an advanced, full-featured asset designed to provide precise and repeatable lithographic control of complicated substrates. It features a clean, low-maintenance design, automated diagnostics, and a wide range of optical and mechanical features. With its advanced features and user-friendly interface, the ACU is ideal for applications requiring higher levels of accuracy and repeatability.