Used AXCELIS / FUSION 200 ACU #9225549 for sale

AXCELIS / FUSION 200 ACU equipment is a full-featured advanced exposure system for high throughput, cost effective, and unsurpassed resolution in semiconductor lithography. The unit's combination of proven advanced lithography and process automation capabilities provides manufacturers with the needed cost savings, and greater practicality in the implementation of advanced process nodes. The machine provides advanced overlay accuracy and registration uniformity, thanks to its precision-calibrated alignment Stage and incorporated registration mark detection systems. Its TwinScan Twinscan 5x ST micro-stepper based wafer stage also allows for extended field-of-views and over-wise processing of large wafers up to 200mm in diameter. The ACU's On-Axis I-line Lighting illuminator delivers enhanced process uniformity and uniformity of the reticles in order to optimize projects. Its solid state lighting tool enhances product performance and lithographic process control. Additionally, its variable prepulse capabilities allow for more-focused balancing of dopant densities, and better control over line and space widths for more advanced process nodes. The asset also offers extensive optional hardware components include a motorized focus unit, distance measurement model, liquid photoresist height measurement equipment, and a direct laser interferometry system. The scalability of these peripheral solutions provides lithographers the flexibility they require to meet their needs. For improved quality and reliability, FUSION 200 ACU has all the necessary features, including multiprojector capabilities, in-situ process control, integrated process recipes, integration with factory automation systems and support for extended or multiple patterning. It also has an advanced wafer-facilitation unit and an integrated vacuum handling machine that allows users to quickly move to and exchange processed wafers with minimal setup time. AXCELIS 200ACU tool is a versatile solution that provides numerous advantages compared to other solutions on the market. It is perfect for integration in new and existing production lines, its architecture promotes the fast changeover of products, and enables cost-saving benefits. The asset is also highly reliable, offers outstanding results, and consistent production process control.