Used AXCELIS / FUSION 200 ACU #9235767 for sale

AXCELIS / FUSION 200 ACU is a comprehensive wafer-level exposure equipment designed to enable repeatable and accurate results for a range of advanced device applications, including semiconductors, MEMS, optoelectronics, and advanced packaging applications. This system features an exclusive Illuminator Unit, comprised of a high-power Xenon lamp, an advanced aberration corrector, and an internal auto-field correction machine. This technology provides a high intensity and uniform light pattern, enabling shorter exposure time and improved device yields. Additionally, a state-of-the-art correction tool minimizes aberrations and distortion of the exposure pattern, further increasing the consistency and accuracy of results. With this combination, exposure on FUSION 200 ACU is capable of attaining double pattern and overlay accuracy of 1.0 µm or less with a fully integrated level of process control. This exposure asset also features a range of integrated subcomponents and process capabilities. These include a standalone 2-stage mapping module, a high-accuracy sub micron stepper, and a laser direct imaging (LDI) module. With these integrated components, AXCELIS 200ACU is capable of supporting a variety of advanced processes, such as extreme ultraviolet (EUV), deep ultraviolet (DUV), and advanced packaging applications, in a single, modular solution. Additionally, FUSION 200ACU offers a high level of flexibility through its configurable architecture. This modular design allows every component to be reconfigured to support a variety of experiments and users' needs. Furthermore, its integrated network and control model enable remote access and operation of the equipment, making it easy to integrate with existing laboratory or factory-floor settings. To maintain an optimal environment, 200 ACU features an advanced transfer system and a gas box to ensure that wafers remain in a safe and clean environment throughout the exposure process. Moreover, its self-leveling dynamic vacuum chuck provides maintenance-free operations and enables higher resolution of patterns on smaller substrates. Altogether, AXCELIS 200 ACU is an ideal exposure solution for research and development applications. Its integrated unit of components, flexible architecture, and robust automation capabilities guarantee repeatable and accurate results for a range of advanced device applications.