Used AXCELIS / FUSION 200 MCU #9257180 for sale

ID: 9257180
Wafer Size: 8"
Asher, 8".
AXCELIS / FUSION 200 MCU (Multi-Cavity UVC) is an ultra-precise photolithography exposure equipment used for the fabrication of integrated circuits. This system utilizes an ultra-fast Xenon flash lamp with a 400-watt arc lamp for fast and accurate exposure. The unit has advanced optics that enable its precision and resolution, maximizing line width accuracy and reduction. The dichroic mirrors, condensing lenses, and filters are all manufactured from highly advanced materials and to the highest quality standards. FUSION 200 MCU exposure machine has a unique feature, which is an extremely fast exposure time of 1ms per exposure, which allows for ultra-fine resolution and better throughput. It has a fast, high-precision step and repeat operations capability with automated alignment and registration. The tool is designed with an intuitive user interface to allow easy navigation and operation of the asset, which makes AXCELIS 200 MCU extremely user-friendly and ergonomic. The interface also includes recipe management capabilities, which provide comprehensive workflow capabilities. The model also utilizes a robotic engine for loading wafers and substrates onto the exposure equipment and a hardware layer for accurate positioning and alignment of masks and substrates. 200 MCU provides repeatable exposure accuracy, utilizing the latest development in beamsplitters, ultra-high vacuum, ultra-low viscosity, and low-contrast regulators. It also has a high-resolution film aligner for full chip alignment with fewer mask marks. The system also has an automated edge bead measurement unit to reduce development time and a comprehensive suite of software packages, such as CAD and Batch Mode, to deliver the full range of schematic, layout, and exposure control capabilities. AXCELIS / FUSION 200 MCU can also be used in conjunction with laser scribing equipment for accurate etching. All in all, FUSION 200 MCU is an extremely reliable and advanced exposure machine that excels at providing the highest level of precision and accuracy, and enables manufacturers to deliver superior quality integrated circuit products.
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