Used AXCELIS / FUSION 200 MCU #9399673 for sale

AXCELIS / FUSION 200 MCU is an advanced microprocessor-based ultraviolet exposure equipment used in the semiconductor industry. The system facilitates improved process control with high throughput and flexibility. The exposure unit includes a patented Hydraulic Emission Module (HEM) and a Smart Seat Substrate Positioning Machine (SSSPS) that provides fast, precise, and repeatable substrate positioning. This tool also features a Robotic Transport Module (RTM) that allows for the conveying of multiple substrates between the HEM and SSSPS. The Hydraulic Emission Module is a specialized set of components that processes the substrate alignment, light intensity control, and dose control of the asset. It is capable of emitting six focused columns of ultraviolet light which ensures uniform exposure of the substrate to the light source. The Smart Seat Substrate Positioning Model allows repetitive alignment of the substrate during each exposure pulse. Its advanced algorithm runs a fast and accurate feedback loop to optimize the contact between the substrate and the mask. This uses a combination of vision sensors, laser probes, fine Z-axis adjustment, and substrate setup parameters. The Robotic Transport Module simplifies the substrate handling process by loading and unloading substrates from the HEM and SSSPS. It allows for the synchronization of conveyor equipment transfer of substrate which reduces time delays between each cycle of the exposure process. FUSION 200 MCU provides the user with a complete set of software tools for data analysis, process control and optimization. It offers the capability of storing and displaying recipes and process parameters and can also generate reports with data from multiple exposures. AXCELIS 200 MCU is also designed for a wide range of substrate sizes, geometries and materials. Its advanced optical design enables it to accommodate varying thickness of the substrate material and changing process conditions. Furthermore, it offers maximum productivity thanks to its improved lifecycle efficiency. Overall, 200 MCU is an advanced, high throughput and flexible exposure system that offers the user greater control over the process and increased efficiency. Its advanced components and software tools provide the user with an optimized exposure process, ensuring accurate Control and optimization of the exposure process.