Used AXCELIS / FUSION 200 PC #9157616 for sale

AXCELIS / FUSION 200 PC is an advanced exposure equipment designed for advanced semiconductor processes. The system offers superior performance in the form of a larger workfield, higher resolution, and superior exposure control. It is capable of exposing substrates up to 200mm in size with advanced shutter control and alignment precision. The unit features high-resolution imaging optics for superior patterning capability on substrates. It can handle a wide range of substrates that require precision exposure, including up to 200mm photo resist, glass, or other highly transparent materials. The machine's unique Auto Focus algorithm allows for automated, on-the-fly adjustment of focus and resolution to ensure optimal, repeatable features on the exposed wafer. The tool is further enhanced by several state-of-the-art features designed to ensure optimal performance and efficiency. The asset features a powerful wafer handling model that has automatic wafer alignment and adjustment to accurately position the wafer within the exposure chamber. It also has an integrated, closed-loop shutter equipment that ensures consistent exposure opening and closing as well as precise shutter control. Additionally, a unique die-to-die pattern placement system ensures accurate alignment between multiple die patterns on the wafer. The unit also features a maximum UV exposure time of 8 seconds. This increases throughput and productivity, while reducing defects associated with overexposure. It also has user-friendly ion pumps that automatically optimize pump speed and optimize UV light distribution. The exposure machine is further protected with an integrated protective glass that ensures safe and consistent operation. FUSION 200 PC also offers advanced features such as laser alignment capability, so that alignment tasks, such as die alignment and pre-exposure plasma cleaning, can be completed on the fly. In addition, the tool is supported by cutting-edge software for process control, including E-beam or Stepper exposure control software, as well as digital I/O control software. Finally, for further reliability and safety, the asset includes hardware and software-level safety monitoring with dedicated safety switches and hardware locks. This ensures that the model is operated in accordance with international safety standards. AXCELIS 200 PC is therefore an ideal equipment for advanced photolithography and packaging processes.