Used AXCELIS / FUSION 200 PCU Polo #9196916 for sale

AXCELIS / FUSION 200 PCU Polo is an advanced exposure equipment, designed to provide precise and repeatable exposures for demanding photomask production. This platform is ideal for both 5X and 6X exposure applications. The Polo is an automated track system featuring high resolution metrology and substrate handling, resulting in superior yield performance. The unit is designed with a patented state-of-the-art, Mass Flow Controlled (MFC) moisture-free dry air technology that provides precise and repeatable doses for critical repeat exposure applications. The MFC technology is capable of reproducing exposure doses to within 0.8%. The machine has advanced substrate handling, including automatic loading, placement and orientation controls. The tool also includes automated backside alignment, and metal alignment monitoring. The platform can process substrates up to 200 mm in size, and can handle substrates up to 1.5 mm thick. The advanced opto-mechanical asset offers excellent optical performance. The optical model utilizes a high performance diffraction-corrected exposure lens, combined with an automated alignment equipment. The advanced exposure system is designed to provide best in-class exposure uniformity of up to 4µm, combined with a low linear distortion of 0.1µm/mm. FUSION 200PCU POLO is designed with user friendly graphical user interface (GUI), enabling rapid setup and precise repeatability of exposure parameters. The unit features operator friendly controls with extensive process and substrate data collection capabilities. This data is used to ensure precise and repeatable exposures. AXCELIS 200 PCU / POLO is an advanced exposure machine that provides precise and repeatable exposures for demanding photomask production. With its proven optical performance, MFC control tool and automated substrate handling, the asset can provide superior yields and precise repeatable doses. The model's user friendly GUI ensures easy setup and precise process control.