Used AXCELIS / FUSION 200 PCU #9038084 for sale

ID: 9038084
Wafer Size: 8"
UV Photo stabilizer, 8" Chamber / Bake 3 Axis robots SMIF.
AXCELIS / FUSION 200 PCU (Process Control Unit) is a highly advanced, fully programmable, low-energy, exposure equipment specifically designed for the manufacturing of advanced semiconductors and other electronic components. It features a cutting-edge process modeling, control, optimization and verification technology that provides maximum process control and consistent, repeatable results. FUSION 200 PCU employs a multi-level process architecture comprised of photoresist modeling, process control, machine control, and performance verification. This allows for maximum control of the process variables and system performance, allowing for the highest levels of process control and repeatability. It has been designed with an ergonomic workstation that allows for easy access to all major unit components including the mainframe processor, a large flat panel monitor, and input/output peripherals. The display panel is user-friendly and provides real-time information on process parameters and data. AXCELIS 200PCU's unique process control technology enables a wide range of process parameters to be precisely controlled and optimized, such as the radiation power, dose rate, beam profiling, and the resolution. This results in sharp imaging, repeatable results, and the ability to tailor the desired design output. The performance verification technology provides an advanced level of quality assurance by enabling the monitoring of machine performance and process recipes, while providing instant feedback with real-time analysis. This is especially beneficial in the verification of fine line, submicron device fabrication. AXCELIS / FUSION 200PCU also features a comprehensive library of photomask library recipes which simplifies the management and optimization of exposures, as well as a comprehensive library of process recipes that enables the automation of multiple processes. With its comprehensive functionality, 200PCU is an ideal solution for the fabrication of advanced semiconductor and other electronic components.
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