Used AXCELIS / FUSION 200 PCU #9231978 for sale

AXCELIS / FUSION 200 PCU is an exposure equipment designed for use in semiconductor processing. It is a high-performance system that can be used for a variety of fabrication processes, including high-resolution lithography, photoresist strip, activation and etching, diffusion, chemical-mechanical planarization and metrology. The unit offers versatile programmability of exposure parameters and high accuracy and repeatability of exposure results. The machine also provides excellent pattern placement accuracy and high throughput performance with minimal residual intensity variation. The tool incorporates an advanced optical asset which includes an aspheric optical lens, a mask alignment model, and a duo-source illumination equipment. This offers high resolution imaging accuracy with reduced aberrations, and uniform illumination over the wafer surface. The system features a split-field imaging with dual-spot and uniform illumination, providing high resolution imaging at high throughput. Additionally, the unit includes three programmable exposure parameters, enabling the user to tailor the machine to the target application and process. The tool is powered by an advanced controller which enables precise control and monitoring of the asset. The controller offers automatic temperature/humidity compensation, enabling the operator to maintain a stable environment for the model. Additionally, the controller incorporates user-programmable parameters for exposure feature edge placement accuracy, overexposure kp factor, and dose uniformity. The equipment is capable of working with multiple media and technologies, and performance is optimized based on the media and requirement of the application. The system has an advanced design to enhance unit reliability, including online diagnostics and low-level maintenance. The machine is also available in a number of configurations, allowing the user to customize the tool for specific application requirements. To ensure optimal performance, professional installation and regular maintenance is recommended. The asset must also be operated in accordance with the manufacturer's instructions to ensure optimal performance and reliability. In addition, it is essential to store the model in a temperature and humidity controlled environment. With proper usage, FUSION 200 PCU will provide reliable and accurate results.