Used AXCELIS / FUSION 200 PCU #9235769 for sale

AXCELIS / FUSION 200 PCU
ID: 9235769
Wafer Size: 8"
Vintage: 1994
Photo stabilizer, 8" 1994 vintage.
AXCELIS / FUSION 200 PCU is a high-powered exposure equipment designed for semiconductor chip production. It features a compact and versatile design that enables rapid handling of many unique requirements. The system consists of an exposure head for providing a uniform field of illumination, a hood plenum for controlling temperature, a conveyor-driven carrier for supporting and transferring wafer/ image plates, and multiple cameras for monitoring and capturing data. The exposure head is constructed from aluminum and zinc-aluminum alloy and features a highly efficient Illumination Unit (HIS) that provides a uniform field of illumination while offering superior illumination throughout the field. The hood plenum is designed to allow users to adjust the temperature according to their needs. The conveyor-driven carrier provides a smooth, reliable conveyance of wafers and image plates to the exposure head. It is equipped with two miniature cameras—one downward-looking and the other oriented in an upward direction- to provide users with readouts for exposure time and focus. Lastly, an automatic shutter ensures that no light is wasted during exposure. FUSION 200 PCU features a user-friendly interface that enables users to program exposure settings accurately, quickly, and efficiently. It also has a short-recipe mode which allows users to quickly program exposure settings that are tailored to individual wafers. The machine is equipped with an interactive touch screen display that allows users to access exposure settings and data in a timely manner. It also features high-precision vision alignment, which allows users to make exact adjustments to their image plates, ensuring excellent alignment and results. AXCELIS 200PCU offers a number of safety features, specifically designed to protect both personnel and equipment. It features a safety light curtain that prevents accidental exposure to light. It also has a self-diagnostic device that automatically monitors the temperature and gas levels in the hood plenum in order to detect potential safety issues. Additionally, the tool contains an emergency stop button which is easily accessed in the event of an emergency. 200PCU is a reliable, robust, and versatile exposure asset that provides users with precise control and high-quality results. Its design makes it ideal for production of multiple types of semiconductor chips in a rapid and consistent manner. The user-friendly interface and enhanced safety features ensure that users are able to quickly and safely program exposure settings and produce high-quality images.
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