Used AXCELIS / FUSION 200 PCU #9235770 for sale

AXCELIS / FUSION 200 PCU is an exposure equipment specifically designed for semiconductor device manufacturing and microelectronics. It provides precise control for medium- to high-throughput production and requires minimal maintenance. The system is suitable for fabricating and testing a variety of devices, including optoelectronics, MEMS, photonics, and LED's. FUSION 200 PCU houses a 200-watt, ultrahigh-power laser source, a 13-position wafer stage, and three independent focusing optics (CO2, NIR, and UV). It offers two loading options (active robot and manual loading) and features a modern thermal unit designed to counteract temperature fluctuations to maintain optimal process conditions. AXCELIS 200PCU is equipped with an ultra-precise motorized Z-axis to achieve the highest precision alignment and custom repeatability. The closed-loop motion control functions and integrated instrumentation contribute to a robust and accurate control of laser exposure dose. The machine allows users to easily tailor their exposure process parameters, including the laser beam shape and shutter, scanning speed, XY movement, and more. It also has built-in safety features to protect against potential errors. 200PCU is highly versatile, providing uniform and fast exposure to photoresists, other materials, and substrates of various sizes. It is compatible with both third-party and FUSION own software solutions and can be engineered to fit various types of automation set-ups. AXCELIS 200 PCU is an advanced and efficient exposure tool for industrial applications. Its cutting-edge technology and highly customizable options ensure superior performance and fast production times. It is an ideal choice for high volume and complex photolithographic and imaging applications.