Used AXCELIS / FUSION 200 PCU #9235771 for sale

AXCELIS / FUSION 200 PCU is an advanced exposure equipment designed for processing a variety of materials for a variety of industries. The system features a large chamber designed to improve heat transfer, provide uniform wafer coverage, and allow for long runs with minimal maintenance. The unit is compatible with a variety of substrates including silicon, gallium nitride, diamond, quartz, and many more. The machine includes an EasyLoadTM Wafer Handler, a compact Load Locker, and a 200 watt X-Ray source. The ultra-high precision scanner ensures accurate imaging of your devices and total process control, down to 5 nm resolution. A unique and revolutionary Cold Target X-Ray Source utilizes an advanced energy dispersive array which accurately projects an electrically tunable spectrum to the wafer surface. The tool also includes a microwave source, providing rapid and uniform baking over the entire wafer for many processes, including CVD and diffusion. The integrated Hydraulic Shuttered Robot Asset reduces wafer handling time to less than one minute. The robot also takes air cleansing steps from the chamber and sends them to a separate cleanroom, thus reducing particle and moisture contamination. The model provides a full range of process parameters for a variety of processes including lithography, high temperature anneal, wet etch and metal deposition. The Process Control Software monitors, coordinates, and guides all components in the equipment, ensuring consistent results. The software also provides excellent flexibility for custom processes and software tools to facilitate custom-designed recipes. The system is also equipped with a variety of safety devices, including air pressure monitors, vacuum monitors, gas detectors, particle sensors, ESD detectors and arc detection devices. The unit is designed to minimize exposure to hazardous materials, minimize the risk of radiation exposure, and minimize the risk of electrical shock. It is also designed to provide radiation shielding protection with a regard to 810-2007. The machine is highly versatile and can be used in a wide range of industries, including microelectronics, optoelectronics, medical, automation, and aerospace. It's quality and safety design ensures that you get consistent, reliable results from your processes. With its wide range of features and applications, FUSION 200 PCU is an excellent choice for the most advanced exposure needs.