Used AXCELIS / FUSION 200 #293639952 for sale

AXCELIS / FUSION 200 is an advanced exposure equipment that is designed to optimize the manufacture of next-generation semiconductor devices. This system incorporates the latest technologies to provide superior throughput, accuracy, and repeatability. FUSION 200 is an interactive, user-friendly unit that offers a wide range of features, making it an excellent choice for high-volume, high-precision production environments. AXCELIS 200 features a high-resolution wafer stage, ultra-high precision scanner, and a high-power pulsed electron beam tool. The wafer stage, which is an advanced design specifically built for fast and accurate alignment of substrates, is capable of moving substrates of up to 380mm (15") in diameter. Its main components are a vacuum chuck, two overhead carrier arms, and two motorized X-Y-Z piezoelectric stages. The scanner is a multi-axis cleaning and metrology tool that enables the precise alignment of substrates to the electron beam. It features a high-speed vector drive machine and a unique scan size optimization algorithm. The electron beam tool is capable of pulsing electron beams up to 150 keV and low-kmV energies and is equipped with a thermal management tool to optimize its lifetime. 200 also offers a wide range of process control, monitoring, and optimization capabilities. SCORPION software enables control of the entire manufacturing process, from initial wafer loading to lithographic imaging and process integration. Analytical data acquisition and analysis is enabled through the suite of on-board process sensors. A customizable graphical user interface and color LCD touch screen allow the operator to easily monitor and control the asset. These tools help ensure the highest possible economics and yields. AXCELIS / FUSION 200 is designed to provide maximum uptime, with a base seal platform designed to reduce the effects of downtime due to particle contamination. In addition, it features an advanced, programmable cleaning cycle, chill plate platform, load/unload ports, and a modern dual beam safety override model. The equipment is also equipped with an open-system architecture that enables seamless integration with other systems. Overall, FUSION 200 is an efficient, reliable and user-friendly unit that can help maximize throughput while ensuring accuracy and repeatability. The machine's innovative design is combined with the latest technologies to provide manufacturers with the ultimate tool for their advanced lithography needs.