Used AXCELIS / FUSION F 300 Series #132416 for sale

AXCELIS / FUSION F 300 Series is an advanced prober station designed for lithography, deposition, and etching application. This equipment offers a modular design to provide maximum flexibility and efficient process throughput while maintaining high accuracy. Its versatility makes it ideal for a wide variety of applications, from research and development to production. Built on a software-controlled platform with intuitive tools, FUSION F 300 Series offers expert level process control and precision for streamlining process integration, development, and deployment. AXCELIS F 300 Series features a 6-axis stage arabesques incorporating linear drives, voicing actuators, and electrostatic clamping for precise movement of the substrate. It also offers advanced overlay monitoring and marking capabilities, allowing for quick and easy correction of off-axis alignment errors. The system includes a highly sensitive dual-view detector and inline filter wheel, enabling precise, adaptive sensing that can cope with environmental variations such as vibration, temperature, and air pressure. F 300 Series is designed to integrate seamlessly into existing processes, utilizing existing hardware and software resources. With an intuitive user interface that provides easy navigation and process setup, AXCELIS / FUSION F 300 Series enables smarter process optimization. It also features end user adjustable parameters, including alignment offsets, filter polarity, correcting modes, and defect thresholds. This unit is further protected from data loss and corruption by automatically detecting the machine and subsystem stability and reverting back to default settings in case of power loss and other environmental issues. FUSION F 300 Series is a robust, high-performance tool designed to meet the demanding opto-electrical needs of lithography, etch, and deposition processes. Its sturdy construction and integrated components are designed to enable precise and repeatable results. With its wide range of features and capabilities, AXCELIS F 300 Series is the ideal solution for high-precision and high-throughput lithography and deposition processes.