Used AXCELIS / FUSION Gemini 200PCU/P #9103139 for sale

FUSION Gemini 200PCU/P equipment is an ultra-high-precision exposure system that provides excellent imaging capabilities and extremely accurate overlay performance. The unit is optimized to handle the most complex, small-pitch devices, with its most distinguishing feature being the ability to accurately image and align overlay alignment marks as small as 0.02 microns. The machine is equipped with an auto-leveling table with dual-price compensation that can make small variations in height more consistent. This advanced technology ensures effective imaging in order to achieve the highest overlay accuracy possible. The vertical and horizontal scanning stages are both designed for optimal accuracy and fast processing speed. The vertical stage has a 50nm resolution with a maximum acceleration of 1G and a max velocity of 400mm/s. The horizontal stage has a resolution of 0.003 microns, a maximum acceleration of 5Gs and a top speed of 250 mm/sec. Both stages have digital torque motors, and are designed to maintain highly accurate alignment during the entire exposure process. For imaging, the tool uses a cutting-edge visible aligner with a 500W green laser. This ensures clean imaging with a wider range of exposure settings for fine-pitch devices. The processor comes with an enhanced imaging controls and auto-exposure asset, allowing for precise control over the exposure parameters. The model also has an integrated thermal management feature, which reduces thermal stress that could affect the equipment's performance. By maintaining a stable thermal environment, the system helps reduce the occurrence of thermal-related errors. The Gemini 200PCU/P unit is designed to operate in an environmentally conscious way. It has a low-noise design, and features a carbon filter machine to reduce the environmental impact of its emissions. Overall, the Gemini 200PCU/P tool from AXCELIS is an excellent tool for achieving extremely accurate overlap of alignment marks on fine-pitch devices. With its advanced imaging features, superior thermal management asset, and incredible accuracy, the model is sure to be a valuable asset to any custom chip production facility.