Used AXCELIS / FUSION Gemini #9258265 for sale

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ID: 9258265
Wafer Size: 8"
Photostabilizer, 8".
AXCELIS / FUSION Gemini is a highly advanced etcher/asher equipment designed to perform accurate and precise patterning of semiconductor and other materials in the most complex devices. This system is used in industrial settings for the fabrication of integrated circuits and other highly sensitive, circuitry based devices. FUSION Gemini is equipped with an array of powerful features such as a sophisticated vacuum processing chamber, high-power laser beam, and multiple robotic sample handling schemes. The vacuum chamber is the key element of the unit which allows for a controlled environment where the etching and ashing process can take place without introducing contamination or any other adverse conditions. Additionally, the chamber's hermetically sealed design and powerful filtration machine reduce the chance of particles entering the chamber and scrub any particles that do enter. The high-power laser beam of AXCELIS Gemini allows for precision etching and ashing by offering both a high-resolution capability and high-throughput rate. This laser is capable of creating feature sizes with tolerance levels in the sub-micron range (less than one-millionth of an inch) with an extremely high accuracy. Additionally, the laser beam is adjustable allowing for diverse etching operations and tailored profiles of materials. Gemini also utilizes multiple robotic sample handling schemes to assist in the etching and ashing procedures. A pair of robotic arms are available to maneuver or pick up the samples, enabling individual devices to be etched or ashed. Some hands-free models also provide the capability of loading multiple samples at once, saving time and labor. Furthermore, multiple chambers can be utilized, allowing for simultaneous processes, applicable when high throughput is required. Finally, AXCELIS / FUSION Gemini tool is designed with safety and reliability in mind. It is equipped with safety features such as siren alarms, emergency shut-off option, and numerous sensors to monitor process conditions. Further, with its robust design and sturdy construction, the asset is built for longevity and to stand the test of time even when subjected to heavy-duty use. Overall, FUSION Gemini is a powerful etcher/asher model that is ideal for the fabrication of highly sensitive devices in the industrial setting. With its sophisticated vacuum chamber, high-power laser beam, and robotic sample handling schemes, AXCELIS Gemini offers both unparalleled resolution and throughput, while providing the necessary safety features and long-term reliability to ensure optimal performance, safety and productivity.
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